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Title: Studies on measuring surface adhesion between sidewalls in boron doped ultrananocrystalline diamond based microelectromechanical devices

Authors:
; ; ;
Publication Date:
OSTI Identifier:
1249848
Grant/Contract Number:
AC02-06CH11357
Type:
Publisher's Accepted Manuscript
Journal Name:
Diamond and Related Materials
Additional Journal Information:
Journal Volume: 55; Journal Issue: C; Related Information: CHORUS Timestamp: 2016-09-04 15:30:12; Journal ID: ISSN 0925-9635
Publisher:
Elsevier
Sponsoring Org:
USDOE Office of Science (SC), Basic Energy Sciences (BES) (SC-22)
Country of Publication:
Netherlands
Language:
English