DOE PAGES title logo U.S. Department of Energy
Office of Scientific and Technical Information

Title: Studies on measuring surface adhesion between sidewalls in boron doped ultrananocrystalline diamond based microelectromechanical devices

Authors:
; ; ;
Publication Date:
Sponsoring Org.:
USDOE Office of Science (SC), Basic Energy Sciences (BES)
OSTI Identifier:
1249848
Grant/Contract Number:  
AC02-06CH11357
Resource Type:
Publisher's Accepted Manuscript
Journal Name:
Diamond and Related Materials
Additional Journal Information:
Journal Name: Diamond and Related Materials Journal Volume: 55 Journal Issue: C; Journal ID: ISSN 0925-9635
Publisher:
Elsevier
Country of Publication:
Netherlands
Language:
English

Citation Formats

Buja, Federico, Kokorian, Jaap, Sumant, Anirudha V., and van Spengen, W. Merlijn. Studies on measuring surface adhesion between sidewalls in boron doped ultrananocrystalline diamond based microelectromechanical devices. Netherlands: N. p., 2015. Web. doi:10.1016/j.diamond.2015.02.008.
Buja, Federico, Kokorian, Jaap, Sumant, Anirudha V., & van Spengen, W. Merlijn. Studies on measuring surface adhesion between sidewalls in boron doped ultrananocrystalline diamond based microelectromechanical devices. Netherlands. https://doi.org/10.1016/j.diamond.2015.02.008
Buja, Federico, Kokorian, Jaap, Sumant, Anirudha V., and van Spengen, W. Merlijn. Fri . "Studies on measuring surface adhesion between sidewalls in boron doped ultrananocrystalline diamond based microelectromechanical devices". Netherlands. https://doi.org/10.1016/j.diamond.2015.02.008.
@article{osti_1249848,
title = {Studies on measuring surface adhesion between sidewalls in boron doped ultrananocrystalline diamond based microelectromechanical devices},
author = {Buja, Federico and Kokorian, Jaap and Sumant, Anirudha V. and van Spengen, W. Merlijn},
abstractNote = {},
doi = {10.1016/j.diamond.2015.02.008},
journal = {Diamond and Related Materials},
number = C,
volume = 55,
place = {Netherlands},
year = {Fri May 01 00:00:00 EDT 2015},
month = {Fri May 01 00:00:00 EDT 2015}
}

Journal Article:
Free Publicly Available Full Text
Publisher's Version of Record
https://doi.org/10.1016/j.diamond.2015.02.008

Citation Metrics:
Cited by: 10 works
Citation information provided by
Web of Science

Save / Share:

Works referenced in this record:

Surface science, MEMS and NEMS: Progress and opportunities for surface science research performed on, or by, microdevices
journal, May 2013


Self-assembled monolayers as anti-stiction coatings for MEMS: characteristics and recent developments
journal, May 2000


Termination of diamond surfaces with hydrogen, oxygen and fluorine using a small, simple plasma gun
journal, April 2010


MEMS/NEMS based on mono-, nano-, and ultrananocrystalline diamond films
journal, June 2014

  • Sumant, Anirudha V.; Auciello, Orlando; Liao, Meiyong
  • MRS Bulletin, Vol. 39, Issue 6
  • DOI: 10.1557/mrs.2014.98

Tribological properties of ultrananocrystalline diamond films in various test atmosphere
journal, November 2011


Surface Stability of Epitaxial Elastic Films by the Casimir Force
journal, July 2002


Hygroscopic properties of carbon and diesel soot particles
journal, August 1997


Adhesion models: From single to multiple asperity contacts
journal, October 2011

  • Prokopovich, Polina; Starov, Victor
  • Advances in Colloid and Interface Science, Vol. 168, Issue 1-2
  • DOI: 10.1016/j.cis.2011.03.004

Ultrananocrystalline and Nanocrystalline Diamond Thin Films for MEMS/NEMS Applications
journal, April 2010

  • Sumant, Anirudha V.; Auciello, Orlando; Carpick, Robert W.
  • MRS Bulletin, Vol. 35, Issue 4
  • DOI: 10.1557/mrs2010.550

Hydrogen passivation of electrically active defects in diamond
journal, October 1989

  • Landstrass, M. I.; Ravi, K. V.
  • Applied Physics Letters, Vol. 55, Issue 14
  • DOI: 10.1063/1.101604

Ultrananocrystalline diamond thin films for MEMS and moving mechanical assembly devices
journal, November 2001


Electrically conducting ultrananocrystalline diamond for the development of a next generation of micro-actuators
journal, August 2014

  • Buja, Federico; Sumant, Anirudha V.; Kokorian, Jaap
  • Sensors and Actuators A: Physical, Vol. 214
  • DOI: 10.1016/j.sna.2014.04.042

Nanotribology and nanomechanics of MEMS/NEMS and BioMEMS/BioNEMS materials and devices
journal, March 2007


A thermal actuator for nanoscale in situ microscopy testing: design and characterization
journal, January 2006

  • Zhu, Yong; Corigliano, Alberto; Espinosa, Horacio D.
  • Journal of Micromechanics and Microengineering, Vol. 16, Issue 2
  • DOI: 10.1088/0960-1317/16/2/008

Hydrophobic diamond films
journal, May 2013

  • Ostrovskaya, L. Yu.; Ral’chenko, V. G.; Vlasov, I. I.
  • Protection of Metals and Physical Chemistry of Surfaces, Vol. 49, Issue 3
  • DOI: 10.1134/S2070205113030118

Scale dependence of micro/nano-friction and adhesion of MEMS/NEMS materials, coatings and lubricants
journal, October 2004


Critical Review: Adhesion in surface micromechanical structures
journal, January 1997

  • Maboudian, Roya
  • Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures, Vol. 15, Issue 1
  • DOI: 10.1116/1.589247

A ‘nano-battering ram’ for measuring surface forces: obtaining force–distance curves and sidewall stiction data with a MEMS device
journal, June 2007

  • Spengen, W. Merlijn van; Bakker, Elco; Frenken, Joost W. M.
  • Journal of Micromechanics and Microengineering, Vol. 17, Issue 7
  • DOI: 10.1088/0960-1317/17/7/S05

The roles of argon addition in the hot filament chemical vapor deposition system
journal, August 2001


The elastic contact of a rough surface
journal, November 1975


The advent of MEMS in space
journal, July 2003


Adhesion-related failure mechanisms in micromechanical devices
journal, September 1997


Ultrananocrystalline Diamond Film as a Wear-Resistant and Protective Coating for Mechanical Seal Applications
journal, January 2005


Silicon carbide as a new MEMS technology
journal, May 2000


Deformation and adhesion of elastic bodies in contact
journal, December 1992


MEMS in medicine and biology
journal, September 2006


Toward the Ultimate Tribological Interface: Surface Chemistry and Nanotribology of Ultrananocrystalline Diamond
journal, April 2005

  • Sumant, A. V.; Grierson, D. S.; Gerbi, J. E.
  • Advanced Materials, Vol. 17, Issue 8, p. 1039-1045
  • DOI: 10.1002/adma.200401264

IC-processed electrostatic micromotors
journal, November 1989


Influence of surface passivation on the friction and wear behavior of ultrananocrystalline diamond and tetrahedral amorphous carbon thin films
journal, April 2012


DLC nano-dot surfaces for tribological applications in MEMS devices
journal, February 2011