Substrate and coating defect planarization strategies for high-laser-fluence multilayer mirrors

Stolz, Christopher J.; Wolfe, Justin E.; Mirkarimi, Paul B.; Folta, James A.; Adams, John J.; Menor, Marlon G.; Teslich, Nick E.; Soufli, Regina; Menoni, Carmen S.; Patel, Dinesh

doi:10.1016/j.tsf.2015.04.047

Title: Substrate and coating defect planarization strategies for high-laser-fluence multilayer mirrors

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Authors:: Stolz, Christopher J.; Wolfe, Justin E.; Mirkarimi, Paul B.; Folta, James A.; Adams, John J.; Menor, Marlon G.; Teslich, Nick E.; Soufli, Regina; Menoni, Carmen S.; Patel, Dinesh

Publication Date:: Thu Oct 01 00:00:00 EDT 2015

Sponsoring Org.:: USDOE

OSTI Identifier:: 1249633

Grant/Contract Number:: W-7405-ENG-48

Resource Type:: Publisher's Accepted Manuscript

Journal Name:: Thin Solid Films

Additional Journal Information:: Journal Name: Thin Solid Films Journal Volume: 592 Journal Issue: PB; Journal ID: ISSN 0040-6090

Publisher:: Elsevier

Country of Publication:: Netherlands

Language:: English

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                    Stolz, Christopher J., Wolfe, Justin E., Mirkarimi, Paul B., Folta, James A., Adams, John J., Menor, Marlon G., Teslich, Nick E., Soufli, Regina, Menoni, Carmen S., and Patel, Dinesh. Substrate and coating defect planarization strategies for high-laser-fluence multilayer mirrors.  Netherlands: N. p., 2015. 
Web.  doi:10.1016/j.tsf.2015.04.047.

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                    Stolz, Christopher J., Wolfe, Justin E., Mirkarimi, Paul B., Folta, James A., Adams, John J., Menor, Marlon G., Teslich, Nick E., Soufli, Regina, Menoni, Carmen S., & Patel, Dinesh. Substrate and coating defect planarization strategies for high-laser-fluence multilayer mirrors.  Netherlands.  https://doi.org/10.1016/j.tsf.2015.04.047

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                    Stolz, Christopher J., Wolfe, Justin E., Mirkarimi, Paul B., Folta, James A., Adams, John J., Menor, Marlon G., Teslich, Nick E., Soufli, Regina, Menoni, Carmen S., and Patel, Dinesh. Thu .  
"Substrate and coating defect planarization strategies for high-laser-fluence multilayer mirrors".  Netherlands.  https://doi.org/10.1016/j.tsf.2015.04.047.

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@article{osti_1249633,

  title        = {Substrate and coating defect planarization strategies for high-laser-fluence multilayer mirrors},

  author       = {Stolz, Christopher J. and Wolfe, Justin E. and Mirkarimi, Paul B. and Folta, James A. and Adams, John J. and Menor, Marlon G. and Teslich, Nick E. and Soufli, Regina and Menoni, Carmen S. and Patel, Dinesh},

  abstractNote = {},

  doi          = {10.1016/j.tsf.2015.04.047},

  journal      = {Thin Solid Films},

  number       = PB,

  volume       = 592,

  place        = {Netherlands},

  year         = {Thu Oct 01 00:00:00 EDT 2015},

  month        = {Thu Oct 01 00:00:00 EDT 2015}

}

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https://doi.org/10.1016/j.tsf.2015.04.047

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