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This content will become publicly available on April 13, 2017

Title: A kinetic model for stress generation in thin films grown from energetic vapor fluxes

Authors:
 [1] ;  [1] ;  [2] ;  [3] ;  [3] ;  [2]
  1. School of Engineering, Brown University, Providence, Rhode Island 02912, USA
  2. Institut P', Département Physique et Mécanique des Matériaux, Université de Poitiers-CNRS-ENSMA, SP2MI, Téléport 2, Bd M. et P. Curie, F-86962 Chasseneuil-Futuroscope, France
  3. Nanoscale Engineering Division, Department of Physics, Chemistry and Biology, Linköping University, SE-581 83 Linköping, Sweden
Publication Date:
OSTI Identifier:
1247217
Grant/Contract Number:
SC0008799
Type:
Publisher's Accepted Manuscript
Journal Name:
Journal of Applied Physics
Additional Journal Information:
Journal Volume: 119; Journal Issue: 14; Journal ID: ISSN 0021-8979
Publisher:
American Institute of Physics
Sponsoring Org:
USDOE
Country of Publication:
United States
Language:
English