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Title: Temperature dependence of the crystalline quality of AlN layer grown on sapphire substrates by metalorganic chemical vapor deposition

Authors:
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Publication Date:
OSTI Identifier:
1246419
Grant/Contract Number:
FC26-08NT01580
Type:
Publisher's Accepted Manuscript
Journal Name:
Journal of Crystal Growth
Additional Journal Information:
Journal Volume: 414; Journal Issue: C; Related Information: CHORUS Timestamp: 2016-09-04 16:38:37; Journal ID: ISSN 0022-0248
Publisher:
Elsevier
Sponsoring Org:
USDOE
Country of Publication:
Netherlands
Language:
English