2D fluid-analytical simulation of electromagnetic effects in low pressure, high frequency electronegative capacitive discharges
- Authors:
- Publication Date:
- Sponsoring Org.:
- USDOE Office of Science (SC), Fusion Energy Sciences (FES)
- OSTI Identifier:
- 1245686
- Grant/Contract Number:
- SC0001939
- Resource Type:
- Publisher's Accepted Manuscript
- Journal Name:
- Plasma Sources Science and Technology
- Additional Journal Information:
- Journal Name: Plasma Sources Science and Technology Journal Volume: 25 Journal Issue: 3; Journal ID: ISSN 0963-0252
- Publisher:
- IOP Publishing
- Country of Publication:
- United Kingdom
- Language:
- English
Citation Formats
Kawamura, E., Lichtenberg, A. J., Lieberman, M. A., and Marakhtanov, A. M. 2D fluid-analytical simulation of electromagnetic effects in low pressure, high frequency electronegative capacitive discharges. United Kingdom: N. p., 2016.
Web. doi:10.1088/0963-0252/25/3/035007.
Kawamura, E., Lichtenberg, A. J., Lieberman, M. A., & Marakhtanov, A. M. 2D fluid-analytical simulation of electromagnetic effects in low pressure, high frequency electronegative capacitive discharges. United Kingdom. https://doi.org/10.1088/0963-0252/25/3/035007
Kawamura, E., Lichtenberg, A. J., Lieberman, M. A., and Marakhtanov, A. M. Wed .
"2D fluid-analytical simulation of electromagnetic effects in low pressure, high frequency electronegative capacitive discharges". United Kingdom. https://doi.org/10.1088/0963-0252/25/3/035007.
@article{osti_1245686,
title = {2D fluid-analytical simulation of electromagnetic effects in low pressure, high frequency electronegative capacitive discharges},
author = {Kawamura, E. and Lichtenberg, A. J. and Lieberman, M. A. and Marakhtanov, A. M.},
abstractNote = {},
doi = {10.1088/0963-0252/25/3/035007},
journal = {Plasma Sources Science and Technology},
number = 3,
volume = 25,
place = {United Kingdom},
year = {Wed Apr 06 00:00:00 EDT 2016},
month = {Wed Apr 06 00:00:00 EDT 2016}
}
Free Publicly Available Full Text
Publisher's Version of Record
https://doi.org/10.1088/0963-0252/25/3/035007
https://doi.org/10.1088/0963-0252/25/3/035007
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Cited by: 13 works
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