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This content will become publicly available on April 6, 2017

Title: 2D fluid-analytical simulation of electromagnetic effects in low pressure, high frequency electronegative capacitive discharges

Authors:
; ; ;
Publication Date:
OSTI Identifier:
1245686
Grant/Contract Number:
SC0001939
Type:
Publisher's Accepted Manuscript
Journal Name:
Plasma Sources Science and Technology
Additional Journal Information:
Journal Volume: 25; Journal Issue: 3; Journal ID: ISSN 0963-0252
Publisher:
IOP Publishing
Sponsoring Org:
USDOE Office of Science (SC), Fusion Energy Sciences (FES) (SC-24)
Country of Publication:
United Kingdom
Language:
English