Design and manufacture of a microchannel plasma reactor by CNC milling

Masters, B. C.; Garvin, T. P.; Mitsingas, C. M.; Ford, K. B.; Marsh, C. P.

doi:10.1016/j.mee.2015.03.052

Title: Design and manufacture of a microchannel plasma reactor by CNC milling

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Authors:: Masters, B. C.; Garvin, T. P.; Mitsingas, C. M.; Ford, K. B.; Marsh, C. P.

Publication Date:: Sun Mar 01 00:00:00 EST 2015

Sponsoring Org.:: USDOE

OSTI Identifier:: 1245671

Resource Type:: Publisher's Accepted Manuscript

Journal Name:: Microelectronic Engineering

Additional Journal Information:: Journal Name: Microelectronic Engineering Journal Volume: 136 Journal Issue: C; Journal ID: ISSN 0167-9317

Publisher:: Elsevier

Country of Publication:: Netherlands

Language:: English

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                    Masters, B. C., Garvin, T. P., Mitsingas, C. M., Ford, K. B., and Marsh, C. P. Design and manufacture of a microchannel plasma reactor by CNC milling.  Netherlands: N. p., 2015. 
Web.  doi:10.1016/j.mee.2015.03.052.

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                    Masters, B. C., Garvin, T. P., Mitsingas, C. M., Ford, K. B., & Marsh, C. P. Design and manufacture of a microchannel plasma reactor by CNC milling.  Netherlands.  https://doi.org/10.1016/j.mee.2015.03.052

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                    Masters, B. C., Garvin, T. P., Mitsingas, C. M., Ford, K. B., and Marsh, C. P. Sun .  
"Design and manufacture of a microchannel plasma reactor by CNC milling".  Netherlands.  https://doi.org/10.1016/j.mee.2015.03.052.

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@article{osti_1245671,

  title        = {Design and manufacture of a microchannel plasma reactor by CNC milling},

  author       = {Masters, B. C. and Garvin, T. P. and Mitsingas, C. M. and Ford, K. B. and Marsh, C. P.},

  abstractNote = {},

  doi          = {10.1016/j.mee.2015.03.052},

  journal      = {Microelectronic Engineering},

  number       = C,

  volume       = 136,

  place        = {Netherlands},

  year         = {Sun Mar 01 00:00:00 EST 2015},

  month        = {Sun Mar 01 00:00:00 EST 2015}

}

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https://doi.org/10.1016/j.mee.2015.03.052

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