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Title: Design and manufacture of a microchannel plasma reactor by CNC milling

Authors:
; ; ; ;
Publication Date:
OSTI Identifier:
1245671
Type:
Publisher's Accepted Manuscript
Journal Name:
Microelectronic Engineering
Additional Journal Information:
Journal Volume: 136; Journal Issue: C; Related Information: CHORUS Timestamp: 2016-09-06 09:13:48; Journal ID: ISSN 0167-9317
Publisher:
Elsevier
Sponsoring Org:
USDOE
Country of Publication:
Netherlands
Language:
English