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Title: Aerosol assisted atmospheric pressure chemical vapor deposition of silicon thin films using liquid cyclic hydrosilanes

Authors:
; ; ; ; ;
Publication Date:
OSTI Identifier:
1245653
Grant/Contract Number:
FC36-08GO88160
Type:
Publisher's Accepted Manuscript
Journal Name:
Thin Solid Films
Additional Journal Information:
Journal Volume: 589; Journal Issue: C; Related Information: CHORUS Timestamp: 2016-09-14 19:45:57; Journal ID: ISSN 0040-6090
Publisher:
Elsevier
Sponsoring Org:
USDOE
Country of Publication:
Netherlands
Language:
English