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Title: Reaction of Methylcyclopentadienyl Manganese Tricarbonyl on Silicon Oxide Surfaces: Implications for Thin Film Atomic Layer Depositions

Authors:
; ; ; ;
Publication Date:
OSTI Identifier:
1245037
Grant/Contract Number:
FG02-03ER46599
Type:
Published Article
Journal Name:
Organometallics
Additional Journal Information:
Journal Volume: 33; Journal Issue: 19; Related Information: CHORUS Timestamp: 2016-09-01 12:26:49; Journal ID: ISSN 0276-7333
Publisher:
American Chemical Society
Sponsoring Org:
USDOE
Country of Publication:
United States
Language:
English