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Title: Atomic-Level Sculpting of Crystalline Oxides: Toward Bulk Nanofabrication with Single Atomic Plane Precision

We demonstrate atomic-level sculpting of 3D crystalline oxide nanostructures from metastable amorphous layer in a scanning transmission electron microscope (STEM). Strontium titanate nanostructures grow epitaxially from the crystalline substrate following the beam path. This method can be used for fabricating crystalline structures as small as 1-2 nm and the process can be observed in situ with atomic resolution. We further demonstrate fabrication of arbitrary shape structures via control of the position and scan speed of the electron beam. Combined with broad availability of the atomic resolved electron microscopy platforms, these observations suggest the feasibility of large scale implementation of bulk atomic-level fabrication as a new enabling tool of nanoscience and technology, providing a bottom-up, atomic-level complement to 3D printing.
Authors:
 [1] ;  [2] ;  [3] ;  [4] ;  [5] ;  [6] ;  [7] ;  [7] ;  [8] ;  [9] ;  [10] ;  [7] ;  [11]
  1. Oak Ridge National Lab. (ORNL), Oak Ridge, TN (United States). Center for Nanophase Materials Science; Oak Ridge National Lab. (ORNL), Oak Ridge, TN (United States). Institute for Functional Imaging of Materials
  2. Oak Ridge National Lab. (ORNL), Oak Ridge, TN (United States). Center for Nanophase Materials Science; Oak Ridge National Lab. (ORNL), Oak Ridge, TN (United States). Materials Sciences and Technology Division
  3. Oak Ridge National Lab. (ORNL), Oak Ridge, TN (United States). Institute for Functional Imaging of Materials; Oak Ridge National Lab. (ORNL), Oak Ridge, TN (United States). Materials Science & Technology Division
  4. Oak Ridge National Lab. (ORNL), Oak Ridge, TN (United States). Materials Science & Technology Division
  5. Vanderbilt Univ., Nashville, TN (United States). Department of Physics and Astronomy
  6. Oak Ridge National Lab. (ORNL), Oak Ridge, TN (United States). Institute for Functional Imaging of Materials
  7. Oak Ridge National Lab. (ORNL), Oak Ridge, TN (United States). Institute for Functional Imaging of Materials; Oak Ridge National Lab. (ORNL), Oak Ridge, TN (United States). Center for Nanophase Materials Science
  8. Oak Ridge National Lab. (ORNL), Oak Ridge, TN (United States). Center for Nanophase Materials Science; Oak Ridge National Lab. (ORNL), Oak Ridge, TN (United States). Computer Science and Mathematics Division
  9. Oak Ridge National Lab. (ORNL), Oak Ridge, TN (United States). Institute for Functional Imaging of Materials; Oak Ridge National Lab. (ORNL), Oak Ridge, TN (United States). Center for Nanophase Materials Science; Oak Ridge National Lab. (ORNL), Oak Ridge, TN (United States). Computer Science and Mathematics Division
  10. National University of Singapore (Singapore). Department of Materials Science and Engineering
  11. Oak Ridge National Lab. (ORNL), Oak Ridge, TN (United States). Institute for Functional Imaging of Materials; Oak Ridge National Lab. (ORNL), Oak Ridge, TN (United States). Center for Nanophase Materials Science; Oak Ridge National Lab. (ORNL), Oak Ridge, TN (United States). Materials Science & Technology Division, High Temperature Materials Lab.
Publication Date:
OSTI Identifier:
1240550
Grant/Contract Number:
AC05-00OR22725
Type:
Accepted Manuscript
Journal Name:
Small
Additional Journal Information:
Journal Volume: 11; Journal Issue: 44; Journal ID: ISSN 1613-6810
Publisher:
Wiley
Research Org:
Oak Ridge National Laboratory (ORNL), Oak Ridge, TN (United States). Center for Nanophase Materials Sciences (CNMS)
Sponsoring Org:
USDOE Office of Science (SC), Basic Energy Sciences (BES) (SC-22)
Country of Publication:
United States
Language:
English
Subject:
77 NANOSCIENCE AND NANOTECHNOLOGY