Ion beam nanopatterning of III-V semiconductors: Consistency of experimental and simulation trends within a chemistry-driven theory
Abstract
In this study, several proposed mechanisms and theoretical models exist concerning nanostructure evolution on III-V semiconductors (particularly GaSb) via ion beam irradiation. However, making quantitative contact between experiment on the one hand and model-parameter dependent predictions from different theories on the other is usually difficult. In this study, we take a different approach and provide an experimental investigation with a range of targets (GaSb, GaAs, GaP) and ion species (Ne, Ar, Kr, Xe) to determine new parametric trends regarding nanostructure evolution. Concurrently, atomistic simulations using binary collision approximation over the same ion/target combinations were performed to determine parametric trends on several quantities related to existing model. A comparison of experimental and numerical trends reveals that the two are broadly consistent under the assumption that instabilities are driven by chemical instability based on phase separation. Furthermore, the atomistic simulations and a survey of material thermodynamic properties suggest that a plausible microscopic mechanism for this process is an ion-enhanced mobility associated with energy deposition by collision cascades.
- Authors:
-
- Purdue Univ., West Lafayette, IN (United States); Birck Nanotechnology Center, West Lafayette, IN (United States); Drexel Univ., Philadelphia, PA (United States)
- Southern Methodist Univ., Dallas, TX (United States)
- Boston Univ., Boston, MA (United States)
- Purdue Univ., West Lafayette, IN (United States)
- Purdue Univ., West Lafayette, IN (United States); Univ. of Illinois at Urbana-Champaign, Urbana, IL (United States)
- Publication Date:
- Research Org.:
- Brookhaven National Laboratory (BNL), Upton, NY (United States)
- Sponsoring Org.:
- USDOE Office of Science (SC), Basic Energy Sciences (BES)
- OSTI Identifier:
- 1240127
- Grant/Contract Number:
- AC02-98CH10886
- Resource Type:
- Accepted Manuscript
- Journal Name:
- Scientific Reports
- Additional Journal Information:
- Journal Volume: 5; Journal ID: ISSN 2045-2322
- Publisher:
- Nature Publishing Group
- Country of Publication:
- United States
- Language:
- English
- Subject:
- 77 NANOSCIENCE AND NANOTECHNOLOGY; 36 MATERIALS SCIENCE; materials science; nanoscale materials
Citation Formats
El-Atwani, O., Norris, S. A., Ludwig, K., Gonderman, S., and Allain, J. P. Ion beam nanopatterning of III-V semiconductors: Consistency of experimental and simulation trends within a chemistry-driven theory. United States: N. p., 2015.
Web. doi:10.1038/srep18207.
El-Atwani, O., Norris, S. A., Ludwig, K., Gonderman, S., & Allain, J. P. Ion beam nanopatterning of III-V semiconductors: Consistency of experimental and simulation trends within a chemistry-driven theory. United States. https://doi.org/10.1038/srep18207
El-Atwani, O., Norris, S. A., Ludwig, K., Gonderman, S., and Allain, J. P. Wed .
"Ion beam nanopatterning of III-V semiconductors: Consistency of experimental and simulation trends within a chemistry-driven theory". United States. https://doi.org/10.1038/srep18207. https://www.osti.gov/servlets/purl/1240127.
@article{osti_1240127,
title = {Ion beam nanopatterning of III-V semiconductors: Consistency of experimental and simulation trends within a chemistry-driven theory},
author = {El-Atwani, O. and Norris, S. A. and Ludwig, K. and Gonderman, S. and Allain, J. P.},
abstractNote = {In this study, several proposed mechanisms and theoretical models exist concerning nanostructure evolution on III-V semiconductors (particularly GaSb) via ion beam irradiation. However, making quantitative contact between experiment on the one hand and model-parameter dependent predictions from different theories on the other is usually difficult. In this study, we take a different approach and provide an experimental investigation with a range of targets (GaSb, GaAs, GaP) and ion species (Ne, Ar, Kr, Xe) to determine new parametric trends regarding nanostructure evolution. Concurrently, atomistic simulations using binary collision approximation over the same ion/target combinations were performed to determine parametric trends on several quantities related to existing model. A comparison of experimental and numerical trends reveals that the two are broadly consistent under the assumption that instabilities are driven by chemical instability based on phase separation. Furthermore, the atomistic simulations and a survey of material thermodynamic properties suggest that a plausible microscopic mechanism for this process is an ion-enhanced mobility associated with energy deposition by collision cascades.},
doi = {10.1038/srep18207},
journal = {Scientific Reports},
number = ,
volume = 5,
place = {United States},
year = {Wed Dec 16 00:00:00 EST 2015},
month = {Wed Dec 16 00:00:00 EST 2015}
}
Web of Science
Works referenced in this record:
Roughening and ripple instabilities on ion-bombarded Si
journal, December 1996
- Carter, G.; Vishnyakov, V.
- Physical Review B, Vol. 54, Issue 24
Well-Aligned Nanocylinder Formation in Phase-Separated Metal-Silicide–Silicon and Metal-Germanide–Germanium Systems
journal, October 2007
- Yasui, N.; Horie, R.; Ohashi, Y.
- Advanced Materials, Vol. 19, Issue 19
Ion‐bombardment‐enhanced diffusion during the growth of sputtered superlattice thin films
journal, August 1978
- Eltoukhy, A. H.; Greene, J. E.
- Applied Physics Letters, Vol. 33, Issue 4
Sculpting nanoscale precipitation patterns in nanocomposite thin films via hyperthermal ion deposition
journal, October 2010
- Abrasonis, Gintautas; Kovács, György J.; Tucker, Mark D.
- Applied Physics Letters, Vol. 97, Issue 16
Crater functions for compound materials: A route to parameter estimation in coupled-PDE models of ion bombardment
journal, January 2014
- Norris, Scott A.; Samela, Juha; Vestberg, Matias
- Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, Vol. 318
Dissipative continuum model for self-organized pattern formation during ion-beam erosion
journal, April 2004
- Facsko, S.; Bobek, T.; Stahl, A.
- Physical Review B, Vol. 69, Issue 15
Formation of Ordered Nanoscale Semiconductor Dots by Ion Sputtering
journal, September 1999
- Facsko, S.
- Science, Vol. 285, Issue 5433
Theory of ripple topography induced by ion bombardment
journal, July 1988
- Bradley, R. Mark; Harper, James M. E.
- Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films, Vol. 6, Issue 4
Flattening of a Nearly Plane Solid Surface due to Capillarity
journal, January 1959
- Mullins, William W.
- Journal of Applied Physics, Vol. 30, Issue 1
Near sputter-threshold GaSb nanopatterning
journal, September 2013
- El-Atwani, Osman; Gonderman, Sean; Paul Allain, Jean
- Journal of Applied Physics, Vol. 114, Issue 10
Redeposition during ion-beam erosion can stabilize well-ordered nanostructures
journal, October 2013
- Diddens, C.; Linz, S. J.
- EPL (Europhysics Letters), Vol. 104, Issue 1
Morphology of ion-sputtered surfaces
journal, December 2002
- Makeev, Maxim A.; Cuerno, Rodolfo; Barabási, Albert-László
- Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, Vol. 197, Issue 3-4
Self-Organized Surface Nanopatterning by Ion Beam Sputtering
book, January 2009
- Muñoz-García, Javier; Vázquez, Luis; Cuerno, Rodolfo
- Toward Functional Nanomaterials
Nanopatterning of metal-coated silicon surfaces via ion beam irradiation: Real time x-ray studies reveal the effect of silicide bonding
journal, March 2013
- El-Atwani, Osman; Gonderman, Sean; DeMasi, Alexander
- Journal of Applied Physics, Vol. 113, Issue 12
Diffuse-interface model for nanopatterning induced by self-sustained ion-etch masking
journal, April 2010
- Le Roy, S.; Søndergård, E.; Nerbø, I. S.
- Physical Review B, Vol. 81, Issue 16
X-ray and neutron scattering from rough surfaces
journal, August 1988
- Sinha, S. K.; Sirota, E. B.; Garoff, S.
- Physical Review B, Vol. 38, Issue 4
Continuum modeling of particle redeposition during ion-beam erosion: One-dimensional case
journal, September 2013
- Diddens, Christian; Linz, Stefan J.
- The European Physical Journal B, Vol. 86, Issue 9
Real-time x-ray scattering study of surface morphology evolution during ion erosion and epitaxial growth of Au(111)
journal, December 1999
- Ramana Murty, M. V.; Curcic, T.; Judy, A.
- Physical Review B, Vol. 60, Issue 24
Spontaneous Nanoscale Corrugation of Ion-Eroded : The Role of Ion-Irradiation-Enhanced Viscous Flow
journal, November 2001
- Umbach, Christopher C.; Headrick, Randall L.; Chang, Kee-Chul
- Physical Review Letters, Vol. 87, Issue 24
Phase-separated Al–Si thin films
journal, August 2005
- Fukutani, Kazuhiko; Tanji, Koichi; Saito, Tatsuya
- Journal of Applied Physics, Vol. 98, Issue 3
XPS and LEISS studies of ion bombarded GaSb, InSb and CdSe surfaces
journal, May 1996
- Yu, W.; Sullivan, J. L.; Saied, S. O.
- Surface Science, Vol. 352-354
Spontaneous Pattern Formation Induced by Ion Bombardment of Binary Compounds
journal, October 2010
- Bradley, R. Mark; Shipman, Patrick D.
- Physical Review Letters, Vol. 105, Issue 14
Energy dependence of quantum dot formation by ion sputtering
journal, April 2001
- Facsko, S.; Kurz, H.; Dekorsy, T.
- Physical Review B, Vol. 63, Issue 16
Molecular dynamics of single-particle impacts predicts phase diagrams for large scale pattern formation
journal, April 2011
- Norris, Scott A.; Samela, Juha; Bukonte, Laura
- Nature Communications, Vol. 2, Issue 1
Spontaneous formation of nanometric multilayers of metal-carbon films by up-hill diffusion during growth
journal, November 2005
- Corbella, C.; Echebarria, B.; Ramírez-Piscina, L.
- Applied Physics Letters, Vol. 87, Issue 21
Free Energy of a Nonuniform System. I. Interfacial Free Energy
journal, February 1958
- Cahn, John W.; Hilliard, John E.
- The Journal of Chemical Physics, Vol. 28, Issue 2
Propulsion of Ripples on Glass by Ion Bombardment
journal, March 2006
- Alkemade, P. F. A.
- Physical Review Letters, Vol. 96, Issue 10
Compositionally Modulated Ripples Induced by Sputtering of Alloy Surfaces
journal, June 2007
- Shenoy, V. B.; Chan, W. L.; Chason, E.
- Physical Review Letters, Vol. 98, Issue 25
Displacement Damage in Irradiated Metals and Semiconductors
book, January 1998
- Averback, R. S.; De La Rubia, T. Diaz
- Solid State Physics - Advances in Research and Applications
Ripple pattern formation on silicon surfaces by low-energy ion-beam erosion: Experiment and theory
journal, December 2005
- Ziberi, B.; Frost, F.; Höche, Th.
- Physical Review B, Vol. 72, Issue 23
Transition from smoothing to roughening of ion-eroded GaSb surfaces
journal, May 2009
- Keller, A.; Biermanns, A.; Carbone, G.
- Applied Physics Letters, Vol. 94, Issue 19
Ion-assisted phase separation in compound films: An alternate route to ordered nanostructures
journal, November 2013
- Norris, Scott A.
- Journal of Applied Physics, Vol. 114, Issue 20
Theory of nanoscale pattern formation induced by normal-incidence ion bombardment of binary compounds
journal, August 2011
- Shipman, Patrick D.; Bradley, R. Mark
- Physical Review B, Vol. 84, Issue 8
From crater functions to partial differential equations: a new approach to ion bombardment induced nonequilibrium pattern formation
journal, May 2009
- Norris, Scott A.; Brenner, Michael P.; Aziz, Michael J.
- Journal of Physics: Condensed Matter, Vol. 21, Issue 22
The importance of non-local shadowing for the topography evolution of a-C:H films grown by toluene based plasma enhanced chemical vapor deposition
journal, April 2009
- Hormann, C.; Meier, S.; Moseler, M.
- The European Physical Journal B, Vol. 69, Issue 2
The significance of in situ conditions in the characterization of GaSb nanopatterned surfaces via ion beam sputtering
journal, October 2011
- El-Atwani, Osman; Allain, J. P.; Cimaroli, Alex
- Journal of Applied Physics, Vol. 110, Issue 7
Making waves: Kinetic processes controlling surface evolution during low energy ion sputtering
journal, June 2007
- Chan, Wai Lun; Chason, Eric
- Journal of Applied Physics, Vol. 101, Issue 12
Ion-induced formation of regular nanostructures on amorphous GaSb surfaces
journal, January 2002
- Facsko, S.; Bobek, T.; Kurz, H.
- Applied Physics Letters, Vol. 80, Issue 1
The effect of native oxide on ion-sputtering-induced nanostructure formation on GaSb surfaces
journal, December 2012
- El-Atwani, Osman; Allain, J. P.; Suslova, Anastassiya
- Applied Physics Letters, Vol. 101, Issue 25
Probing surface and interface morphology with Grazing Incidence Small Angle X-Ray Scattering
journal, August 2009
- Renaud, Gilles; Lazzari, Rémi; Leroy, Frédéric
- Surface Science Reports, Vol. 64, Issue 8
Self-Organized Ordering of Nanostructures Produced by Ion-Beam Sputtering
journal, January 2005
- Castro, Mario; Cuerno, Rodolfo; Vázquez, Luis
- Physical Review Letters, Vol. 94, Issue 1
Angle-resolved low-energy ion scattering studies of quasicrystalline Al–Pd–Mn
journal, December 2002
- Jenks, Cynthia J.; Ross, Amy R.; Lograsso, Thomas A.
- Surface Science, Vol. 521, Issue 1-2
Nanoscale surface pattern formation kinetics on germanium irradiated by Kr ions
journal, December 2012
- Anzenberg, Eitan; Perkinson, Joy C.; Madi, Charbel S.
- Physical Review B, Vol. 86, Issue 24
Highly ordered self-organized dot patterns on Si surfaces by low-energy ion-beam erosion
journal, July 2005
- Ziberi, B.; Frost, F.; Rauschenbach, B.
- Applied Physics Letters, Vol. 87, Issue 3
Instability types at ion-assisted alloy deposition: From two-dimensional to three-dimensional nanopattern growth
journal, August 2012
- Abrasonis, Gintautas; Morawetz, Klaus
- Physical Review B, Vol. 86, Issue 8
Self-sustained etch masking: A general concept to initiate the formation of nanopatterns during ion erosion
journal, November 2009
- Le Roy, S.; Barthel, E.; Brun, N.
- Journal of Applied Physics, Vol. 106, Issue 9
Enhanced diffusion in Si and Ge by light ion implantation
journal, August 1972
- Minear, Roger L.; Nelson, Daniel G.; Gibbons, James F.
- Journal of Applied Physics, Vol. 43, Issue 8
Silicon nanodot formation and self-ordering under bombardment with heavy Bi 3 ions
journal, May 2013
- Böttger, Roman; Heinig, Karl-Heinz; Bischoff, Lothar
- physica status solidi (RRL) - Rapid Research Letters, Vol. 7, Issue 7
Redeposition of sputtered material is a nonlinear effect
journal, February 2011
- Bradley, R. Mark
- Physical Review B, Vol. 83, Issue 7
Surface instability of binary compounds caused by sputter yield amplification
journal, June 2012
- Mark Bradley, R.
- Journal of Applied Physics, Vol. 111, Issue 11
In situ x-ray studies of native and Mo-seeded surface nanostructuring during ion bombardment of Si(100)
journal, May 2009
- Ozaydin-Ince, G.; Ludwig Jr, K. F.
- Journal of Physics: Condensed Matter, Vol. 21, Issue 22
On the role of Gibbsian segregation in causing preferential sputtering
journal, February 1985
- Kelly, Roger
- Surface and Interface Analysis, Vol. 7, Issue 1
Dynamic Scaling of Ion-Sputtered Surfaces
journal, June 1995
- Cuerno, Rodolfo; Barabási, Albert-László
- Physical Review Letters, Vol. 74, Issue 23
Iron-assisted ion beam patterning of Si(001) in the crystalline regime
journal, July 2012
- Macko, Sven; Grenzer, Jörg; Frost, Frank
- New Journal of Physics, Vol. 14, Issue 7
Effects of Mo seeding on the formation of Si nanodots during low-energy ion bombardment
journal, January 2008
- Ozaydin, Gozde; Ludwig, Karl F.; Zhou, Hua
- Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures, Vol. 26, Issue 2
Molecular-dynamics study of the decomposition of an unstable Ni–Ag alloy
journal, June 1999
- Colla, Thomas J.; Urbassek, Herbert M.; Averback, Robert S.
- Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, Vol. 153, Issue 1-4
Linear stability and instability patterns in ion-sputtered silicon
journal, May 2009
- Madi, Charbel S.; Bola George, H.; Aziz, Michael J.
- Journal of Physics: Condensed Matter, Vol. 21, Issue 22
In-situ probing of near and below sputter-threshold ion-induced nanopatterning on GaSb(100)
journal, February 2012
- El-Atwani, O.; Allain, J. P.; Ortoleva, S.
- Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, Vol. 272
Real-time x-ray studies of Mo-seeded Si nanodot formation during ion bombardment
journal, October 2005
- Ozaydin, Gozde; Özcan, Ahmet S.; Wang, Yiyi
- Applied Physics Letters, Vol. 87, Issue 16
In situ x-ray scattering study of self-organized nanodot pattern formation on GaSb(001) by ion beam sputtering
journal, September 2007
- Plantevin, O.; Gago, R.; Vázquez, L.
- Applied Physics Letters, Vol. 91, Issue 11
Sputtering of Si nanospheres
journal, July 2014
- Nietiadi, Maureen L.; Sandoval, Luis; Urbassek, Herbert M.
- Physical Review B, Vol. 90, Issue 4
Crater function approach to ion-induced nanoscale pattern formation: Craters for flat surfaces are insufficient
journal, June 2014
- Harrison, Matt P.; Bradley, R. Mark
- Physical Review B, Vol. 89, Issue 24
A mechanism of surface micro-roughening by ion bombardment
journal, November 1973
- Sigmund, Peter
- Journal of Materials Science, Vol. 8, Issue 11
Pattern Formation and Dynamics in Nonequilibrium Systems
book, January 2009
- Cross, Michael; Greenside, Henry
- Cambridge University Press
Probing surface and interface morphology with Grazing Incidence Small Angle X-Ray Scattering
journal, August 2009
- Renaud, Gilles; Lazzari, Rémi; Leroy, Frédéric
- Surface Science Reports, Vol. 64, Issue 8
Molecular dynamics of single-particle impacts predicts phase diagrams for large scale pattern formation
journal, April 2011
- Norris, Scott A.; Samela, Juha; Bukonte, Laura
- Nature Communications, Vol. 2, Issue 1
Self-sustained etch masking: A general concept to initiate the formation of nanopatterns during ion erosion
journal, November 2009
- Le Roy, S.; Barthel, E.; Brun, N.
- Journal of Applied Physics, Vol. 106, Issue 9
The significance of in situ conditions in the characterization of GaSb nanopatterned surfaces via ion beam sputtering
journal, October 2011
- El-Atwani, Osman; Allain, J. P.; Cimaroli, Alex
- Journal of Applied Physics, Vol. 110, Issue 7
Nanopatterning of metal-coated silicon surfaces via ion beam irradiation: Real time x-ray studies reveal the effect of silicide bonding
journal, March 2013
- El-Atwani, Osman; Gonderman, Sean; DeMasi, Alexander
- Journal of Applied Physics, Vol. 113, Issue 12
Near sputter-threshold GaSb nanopatterning
journal, September 2013
- El-Atwani, Osman; Gonderman, Sean; Paul Allain, Jean
- Journal of Applied Physics, Vol. 114, Issue 10
Ion-assisted phase separation in compound films: An alternate route to ordered nanostructures
journal, November 2013
- Norris, Scott A.
- Journal of Applied Physics, Vol. 114, Issue 20
In situ x-ray studies of native and Mo-seeded surface nanostructuring during ion bombardment of Si(100)
journal, May 2009
- Ozaydin-Ince, G.; Ludwig Jr, K. F.
- Journal of Physics: Condensed Matter, Vol. 21, Issue 22
Linear stability and instability patterns in ion-sputtered silicon
journal, May 2009
- Madi, Charbel S.; Bola George, H.; Aziz, Michael J.
- Journal of Physics: Condensed Matter, Vol. 21, Issue 22
Effects of Mo seeding on the formation of Si nanodots during low-energy ion bombardment
journal, January 2008
- Ozaydin, Gozde; Ludwig, Karl F.; Zhou, Hua
- Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures, Vol. 26, Issue 2
Formation of silicon nanodots via ion beam sputtering of ultrathin gold thin film coatings on Si
journal, May 2011
- El-Atwani, Osman; Ortoleva, Sami; Cimaroli, Alex
- Nanoscale Research Letters, Vol. 6, Issue 1
Instability types at ion-assisted alloy deposition: from two-dimensional to three-dimensional nanopattern growth
text, January 2011
- Abrasonis, Gintautas; Morawetz, Klaus
- arXiv
Morphology of Ion-Sputtered Surfaces
preprint, January 2000
- Makeev, Maxim; Cuerno, Rodolfo; Barabási, Albert-László
- arXiv
Dynamic Scaling of Ion-Sputtered Surfaces
text, January 1994
- Cuerno, Rodolfo; Barabasi, Albert-Laszlo
- arXiv
Works referencing / citing this record:
Ion-Beam Sculpting of Nanowires
journal, November 2017
- Aramesh, Morteza
- physica status solidi (RRL) - Rapid Research Letters, Vol. 12, Issue 1
The influence of projectile ion induced chemistry on surface pattern formation
journal, July 2016
- Karmakar, Prasanta; Satpati, Biswarup
- Journal of Applied Physics, Vol. 120, Issue 2
Ion-induced nanopatterning of silicon: Toward a predictive model
journal, March 2019
- Norris, Scott A.; Aziz, Michael J.
- Applied Physics Reviews, Vol. 6, Issue 1
Nanoporous Structure Formation in GaSb, InSb, and Ge by Ion Beam Irradiation under Controlled Point Defect Creation Conditions
journal, July 2017
- Yanagida, Yusuke; Oishi, Tomoya; Miyaji, Takashi
- Nanomaterials, Vol. 7, Issue 7
Nanoporous Structure Formation on the Surface of InSb by Ion Beam Irradiation
journal, July 2017
- Miyaji, Takashi; Nitta, Noriko
- Nanomaterials, Vol. 7, Issue 8