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Title: Nonlinear standing wave excitation by series resonance-enhanced harmonics in low pressure capacitive discharges

Authors:
; ; ;
Publication Date:
OSTI Identifier:
1239007
Grant/Contract Number:
SC000193
Type:
Publisher's Accepted Manuscript
Journal Name:
Plasma Sources Science and Technology
Additional Journal Information:
Journal Volume: 24; Journal Issue: 5; Journal ID: ISSN 0963-0252
Publisher:
IOP Publishing
Sponsoring Org:
USDOE Office of Science (SC), Fusion Energy Sciences (FES) (SC-24)
Country of Publication:
United Kingdom
Language:
English