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Title: The impact of porosity on the formation of manganese based copper diffusion barrier layers on low- κ dielectric materials

Authors:
; ; ; ; ; ;
Publication Date:
OSTI Identifier:
1238920
Grant/Contract Number:
AC02-98CH10886
Type:
Publisher's Accepted Manuscript
Journal Name:
Journal of Physics. D, Applied Physics
Additional Journal Information:
Journal Volume: 48; Journal Issue: 32; Journal ID: ISSN 0022-3727
Publisher:
IOP Publishing
Sponsoring Org:
USDOE Advanced Research Projects Agency - Energy (ARPA-E)
Country of Publication:
United Kingdom
Language:
English