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This content will become publicly available on January 20, 2017

Title: Metalorganic chemical vapor deposition and characterization of (Al,Si)O dielectrics for GaN–based devices

In this study, we report on the growth and electrical characterization of (Al,Si)O dielectrics grown by metalorganic chemical vapor deposition (MOCVD) using trimethylaluminum, oxygen, and silane as precursors. The growth rates, refractive indices, and composition of (Al,Si)O films grown on Si(001) were determined from ellipsometry and XPS measurements. Crystallinity and electrical properties of (Al,Si)O films grown in situ on c-plane GaN were characterized using grazing incidence X-ray diffraction and capacitance–voltage with current–voltage measurements, respectively. Si concentration in the films was found to be tunable by varying the trimethylaluminum and/or oxygen precursor flows. The Si incorporation suppressed the formation of crystalline domains, leading to amorphous films that resulted in reduced interfacial trap density, low gate leakage and ultra-low hysteresis in (Al,Si)O/n-GaN MOS-capacitors.
Authors:
 [1] ;  [1] ;  [1] ;  [1] ;  [2] ;  [1] ;  [1] ;  [1] ;  [1] ;  [1] ;  [1]
  1. Univ. of California, Santa Barbara, CA (United States)
  2. Univ. of Padova, Padova (Italy)
Publication Date:
OSTI Identifier:
1238680
Report Number(s):
DOE-NCSU--0006521
Journal ID: ISSN 0021-4922
Grant/Contract Number:
EE0006521
Type:
Accepted Manuscript
Journal Name:
Japanese Journal of Applied Physics
Additional Journal Information:
Journal Volume: 55; Journal Issue: 2; Journal ID: ISSN 0021-4922
Publisher:
Japan Society of Applied Physics
Research Org:
North Carolina State Univ., Raleigh, NC (United States)
Sponsoring Org:
USDOE Office of Energy Efficiency and Renewable Energy (EERE), Advanced Manufacturing Office (EE-5A)
Contributing Orgs:
PowerAmerica Institute
Country of Publication:
United States
Language:
English
Subject:
36 MATERIALS SCIENCE; 42 ENGINEERING; 99 GENERAL AND MISCELLANEOUS; 29 ENERGY PLANNING, POLICY, AND ECONOMY; 25 ENERGY STORAGE