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Title: Optical and mechanical properties of nanocrystalline ZrC thin films grown by pulsed laser deposition.

Thin ZrC films (<500 nm) were grown on (100) Si substrates at a substrate temperature of 500 °C by the pulsed laser deposition (PLD) technique using a KrF excimer laser under different CH4 pressures. Glancing incidence X-ray diffraction showed that films were nanocrystalline, while X-ray reflectivity studies found out films were very dense and exhibited a smooth surface morphology. Optical spectroscopy data shows that the films have high reflectivity (>90%) in the infrared region, characteristic of metallic behavior. Nanoindentation results indicated that films deposited under lower CH4 pressures exhibited slightly higher nanohardness and Young modulus values than films deposited under higher pressures. As a result, tribological characterization revealed that these films exhibited relatively high wear resistance and steady-state friction coefficients on the order of μ = 0.4.
Authors:
 [1] ;  [1] ;  [2] ;  [2] ;  [2] ;  [3] ;  [4] ;  [1] ;  [2]
  1. National Institute for Laser, Plasma, and Radiation Physics, Magurele (Romania)
  2. Univ. of Florida, Gainesville, FL (United States)
  3. Ramapo College of New Jersey, Mahwah, NJ (United States)
  4. Sandia National Lab. (SNL-NM), Albuquerque, NM (United States)
Publication Date:
OSTI Identifier:
1236229
Report Number(s):
SAND--2015-0364J
Journal ID: ISSN 0169-4332; 562238
Grant/Contract Number:
AC04-94AL85000
Type:
Accepted Manuscript
Journal Name:
Applied Surface Science
Additional Journal Information:
Journal Volume: 352; Journal Issue: C; Journal ID: ISSN 0169-4332
Publisher:
Elsevier
Research Org:
Sandia National Laboratories (SNL-NM), Albuquerque, NM (United States)
Sponsoring Org:
unfunded
Country of Publication:
United States
Language:
English
Subject:
77 NANOSCIENCE AND NANOTECHNOLOGY ZrC; Hard coating; pulsed laser deposition; Infrared optical properties