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This content will become publicly available on January 21, 2017

Title: Influence of ionisation zone motion in high power impulse magnetron sputtering on angular ion flux and NbO x film growth

Authors:
; ; ;
Publication Date:
OSTI Identifier:
1235495
Grant/Contract Number:
AC02-05CH11231
Type:
Publisher's Accepted Manuscript
Journal Name:
Plasma Sources Science and Technology
Additional Journal Information:
Journal Volume: 25; Journal Issue: 1; Journal ID: ISSN 0963-0252
Publisher:
IOP Publishing
Sponsoring Org:
USDOE
Country of Publication:
United Kingdom
Language:
English