Characterization of the temperature dependence of the thermoreflectance coefficient for conductive thin films
Abstract
In this work, we describe a novel approach for calibration of the thermoreflectance coefficient, ideally suited for measurements in a vacuum thermostat, and present the high temperature thermoreflectance coefficients for several metals commonly encountered in electronic devices: gold, platinum, and aluminum. The effect of passivation on these metals is also explored, and we demonstrate the signal to noise ratio of a thermoreflectance measurement can be improved with informed selection of the dielectric layer thickness. Additionally, the thermo-optic coefficients of the metals are extracted over a wide temperature range. The results presented here can be utilized in the optimization of experimental configurations for high temperature thermoreflectance imaging.
- Authors:
-
- Univ. of California, Santa Cruz, CA (United States); Purdue Univ., West Lafayette, IN (United States)
- Purdue Univ., West Lafayette, IN (United States)
- Publication Date:
- Research Org.:
- Univ. of California, Santa Barbara, CA (United States). Energy Frontier Research Center (EFRC) Center for Energy Efficient Materials (CEEM)
- Sponsoring Org.:
- USDOE Office of Science (SC), Basic Energy Sciences (BES); Army Research Office (ARO)
- OSTI Identifier:
- 1369748
- Alternate Identifier(s):
- OSTI ID: 1228545
- Grant/Contract Number:
- SC0001009
- Resource Type:
- Accepted Manuscript
- Journal Name:
- Review of Scientific Instruments
- Additional Journal Information:
- Journal Volume: 86; Journal Issue: 2; Related Information: CEEM partners with the University of California, Santa Barbara (lead); Purdue University; Los Alamos National Laboratory; National Renewable Energy Laboratory; Journal ID: ISSN 0034-6748
- Publisher:
- American Institute of Physics (AIP)
- Country of Publication:
- United States
- Language:
- English
- Subject:
- 47 OTHER INSTRUMENTATION
Citation Formats
Favaloro, T., Bahk, J. -H., and Shakouri, A. Characterization of the temperature dependence of the thermoreflectance coefficient for conductive thin films. United States: N. p., 2015.
Web. doi:10.1063/1.4907354.
Favaloro, T., Bahk, J. -H., & Shakouri, A. Characterization of the temperature dependence of the thermoreflectance coefficient for conductive thin films. United States. https://doi.org/10.1063/1.4907354
Favaloro, T., Bahk, J. -H., and Shakouri, A. Fri .
"Characterization of the temperature dependence of the thermoreflectance coefficient for conductive thin films". United States. https://doi.org/10.1063/1.4907354. https://www.osti.gov/servlets/purl/1369748.
@article{osti_1369748,
title = {Characterization of the temperature dependence of the thermoreflectance coefficient for conductive thin films},
author = {Favaloro, T. and Bahk, J. -H. and Shakouri, A.},
abstractNote = {In this work, we describe a novel approach for calibration of the thermoreflectance coefficient, ideally suited for measurements in a vacuum thermostat, and present the high temperature thermoreflectance coefficients for several metals commonly encountered in electronic devices: gold, platinum, and aluminum. The effect of passivation on these metals is also explored, and we demonstrate the signal to noise ratio of a thermoreflectance measurement can be improved with informed selection of the dielectric layer thickness. Additionally, the thermo-optic coefficients of the metals are extracted over a wide temperature range. The results presented here can be utilized in the optimization of experimental configurations for high temperature thermoreflectance imaging.},
doi = {10.1063/1.4907354},
journal = {Review of Scientific Instruments},
number = 2,
volume = 86,
place = {United States},
year = {Fri Feb 13 00:00:00 EST 2015},
month = {Fri Feb 13 00:00:00 EST 2015}
}
Web of Science
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