DOE PAGES title logo U.S. Department of Energy
Office of Scientific and Technical Information

Title: Characterization of the temperature dependence of the thermoreflectance coefficient for conductive thin films

Abstract

In this work, we describe a novel approach for calibration of the thermoreflectance coefficient, ideally suited for measurements in a vacuum thermostat, and present the high temperature thermoreflectance coefficients for several metals commonly encountered in electronic devices: gold, platinum, and aluminum. The effect of passivation on these metals is also explored, and we demonstrate the signal to noise ratio of a thermoreflectance measurement can be improved with informed selection of the dielectric layer thickness. Additionally, the thermo-optic coefficients of the metals are extracted over a wide temperature range. The results presented here can be utilized in the optimization of experimental configurations for high temperature thermoreflectance imaging.

Authors:
 [1];  [2];  [1]
  1. Univ. of California, Santa Cruz, CA (United States); Purdue Univ., West Lafayette, IN (United States)
  2. Purdue Univ., West Lafayette, IN (United States)
Publication Date:
Research Org.:
Univ. of California, Santa Barbara, CA (United States). Energy Frontier Research Center (EFRC) Center for Energy Efficient Materials (CEEM)
Sponsoring Org.:
USDOE Office of Science (SC), Basic Energy Sciences (BES); Army Research Office (ARO)
OSTI Identifier:
1369748
Alternate Identifier(s):
OSTI ID: 1228545
Grant/Contract Number:  
SC0001009
Resource Type:
Accepted Manuscript
Journal Name:
Review of Scientific Instruments
Additional Journal Information:
Journal Volume: 86; Journal Issue: 2; Related Information: CEEM partners with the University of California, Santa Barbara (lead); Purdue University; Los Alamos National Laboratory; National Renewable Energy Laboratory; Journal ID: ISSN 0034-6748
Publisher:
American Institute of Physics (AIP)
Country of Publication:
United States
Language:
English
Subject:
47 OTHER INSTRUMENTATION

Citation Formats

Favaloro, T., Bahk, J. -H., and Shakouri, A. Characterization of the temperature dependence of the thermoreflectance coefficient for conductive thin films. United States: N. p., 2015. Web. doi:10.1063/1.4907354.
Favaloro, T., Bahk, J. -H., & Shakouri, A. Characterization of the temperature dependence of the thermoreflectance coefficient for conductive thin films. United States. https://doi.org/10.1063/1.4907354
Favaloro, T., Bahk, J. -H., and Shakouri, A. Fri . "Characterization of the temperature dependence of the thermoreflectance coefficient for conductive thin films". United States. https://doi.org/10.1063/1.4907354. https://www.osti.gov/servlets/purl/1369748.
@article{osti_1369748,
title = {Characterization of the temperature dependence of the thermoreflectance coefficient for conductive thin films},
author = {Favaloro, T. and Bahk, J. -H. and Shakouri, A.},
abstractNote = {In this work, we describe a novel approach for calibration of the thermoreflectance coefficient, ideally suited for measurements in a vacuum thermostat, and present the high temperature thermoreflectance coefficients for several metals commonly encountered in electronic devices: gold, platinum, and aluminum. The effect of passivation on these metals is also explored, and we demonstrate the signal to noise ratio of a thermoreflectance measurement can be improved with informed selection of the dielectric layer thickness. Additionally, the thermo-optic coefficients of the metals are extracted over a wide temperature range. The results presented here can be utilized in the optimization of experimental configurations for high temperature thermoreflectance imaging.},
doi = {10.1063/1.4907354},
journal = {Review of Scientific Instruments},
number = 2,
volume = 86,
place = {United States},
year = {Fri Feb 13 00:00:00 EST 2015},
month = {Fri Feb 13 00:00:00 EST 2015}
}

Journal Article:
Free Publicly Available Full Text
Publisher's Version of Record

Citation Metrics:
Cited by: 60 works
Citation information provided by
Web of Science

Save / Share:

Works referenced in this record:

High resolution photothermal imaging of high frequency phenomena using a visible charge coupled device camera associated with a multichannel lock-in scheme
journal, September 1999

  • Grauby, S.; Forget, B. C.; Holé, S.
  • Review of Scientific Instruments, Vol. 70, Issue 9
  • DOI: 10.1063/1.1149966

High temperature thermoreflectance imaging and transient Harman characterization of thermoelectric energy conversion devices
journal, July 2014

  • Favaloro, T.; Ziabari, A.; Bahk, J. -H.
  • Journal of Applied Physics, Vol. 116, Issue 3
  • DOI: 10.1063/1.4885198

CCD-based thermoreflectance microscopy: principles and applications
journal, June 2009


Thermomodulation Spectra of Al, Au, and Cu
journal, May 1972


Thermal conductivity of a -Si:H thin films
journal, September 1994


The optical properties of copper and gold as a function of temperature
journal, October 1969


Thermal conductivity measurement from 30 to 750 K: the 3ω method
journal, February 1990

  • Cahill, David G.
  • Review of Scientific Instruments, Vol. 61, Issue 2
  • DOI: 10.1063/1.1141498

Theoretical and experimental investigation of the thermal resolution and dynamic range of CCD-based thermoreflectance imaging
journal, January 2007

  • Mayer, Peter M.; Lüerßen, Dietrich; Ram, Rajeev J.
  • Journal of the Optical Society of America A, Vol. 24, Issue 4
  • DOI: 10.1364/josaa.24.001156

Characterization of Single Barrier Microrefrigerators at Cryogenic Temperatures
journal, February 2009


Temperature evolution of optical constants and their tuning in silver
journal, August 2013


Low energy interband transitions in aluminium
journal, January 1977


Thermoreflectance of metal transducers for optical pump-probe studies of thermal properties
journal, January 2012

  • Wilson, R. B.; Apgar, Brent A.; Martin, Lane W.
  • Optics Express, Vol. 20, Issue 27
  • DOI: 10.1364/oe.20.028829

Thermoreflectance temperature imaging of integrated circuits: calibration technique and quantitative comparison with integrated sensors and simulations
journal, September 2006


The Thermo Optic Coefficient of Amorphous SiN Films in the Near-Infrared and Visible Regions and Its Experimental Determination
journal, April 2013

  • Zanatta, Antonio R.; Gallo, Ivan B.
  • Applied Physics Express, Vol. 6, Issue 4
  • DOI: 10.7567/apex.6.042402

Measuring and predicting the thermoreflectance sensitivity as a function of wavelength on encapsulated materials
journal, January 2003

  • Tessier, G.; Jerosolimski, G.; Holé, S.
  • Review of Scientific Instruments, Vol. 74, Issue 1
  • DOI: 10.1063/1.1517153

Temperature dependence of the optical properties of Au, Ag and Cu
journal, August 1976

  • Winsemius, P.; Kampen, F. F. van; Lengkeek, H. P.
  • Journal of Physics F: Metal Physics, Vol. 6, Issue 8
  • DOI: 10.1088/0305-4608/6/8/017

Relativistic Band Calculation and the Optical Properties of Gold
journal, November 1971


Laser beam thermography of circuits in the particular case of passivated semiconductors
journal, February 1996


Thermal Conductivity of Silicon and Germanium from 3°K to the Melting Point
journal, May 1964


Works referencing / citing this record:

Tutorial: Time-domain thermoreflectance (TDTR) for thermal property characterization of bulk and thin film materials
journal, October 2018

  • Jiang, Puqing; Qian, Xin; Yang, Ronggui
  • Journal of Applied Physics, Vol. 124, Issue 16
  • DOI: 10.1063/1.5046944

A steady-state thermoreflectance method to measure thermal conductivity
journal, February 2019

  • Braun, Jeffrey L.; Olson, David H.; Gaskins, John T.
  • Review of Scientific Instruments, Vol. 90, Issue 2
  • DOI: 10.1063/1.5056182

Hot carrier dynamics in a dispersionless plasmonic system
journal, December 2019

  • Nayak, Banoj Kumar; Prabhu, S. S.; Achanta, Venu Gopal
  • Journal of Applied Physics, Vol. 126, Issue 21
  • DOI: 10.1063/1.5119943

Unraveling Phononic, Optoacoustic, and Mechanical Properties of Metals with Light-Driven Hypersound
journal, January 2020


Magneto-Optical Detection of the Spin Hall Effect in Pt and W Thin Films
journal, August 2017


Magneto-Optical Detection of the Spin Hall Effect in Pt and W Thin Films
text, January 2017


Hot carrier dynamics in a dispersionless plasmonic system
text, January 2019


Simultaneous imaging of magnetic field and temperature distributions by magneto optical indicator microscopy
journal, March 2017

  • Lee, Hanju; Jeon, Sunghoon; Friedman, Barry
  • Scientific Reports, Vol. 7, Issue 1
  • DOI: 10.1038/srep43804

Optical birefringence imaging of x-ray excited lithium tantalate
journal, August 2017

  • Durbin, S. M.; Landcastle, A.; DiChiara, A.
  • APL Photonics, Vol. 2, Issue 8
  • DOI: 10.1063/1.4997414

A numerical fitting routine for frequency-domain thermoreflectance measurements of nanoscale material systems having arbitrary geometries
journal, January 2021

  • Warzoha, Ronald J.; Wilson, Adam A.; Donovan, Brian F.
  • Journal of Applied Physics, Vol. 129, Issue 3
  • DOI: 10.1063/5.0030168