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Title: Plasma sputtering robotic device for in-situ thick coatings of long, small diameter vacuum tubesa)

Authors:
 [1] ;  [1] ;  [1] ;  [2] ;  [2] ;  [2] ;  [1] ;  [2] ;  [2] ;  [1] ;  [1] ;  [2] ;  [1]
  1. Brookhaven National Laboratory, Upton, New York 11973, USA
  2. PVI, Oxnard, California 93031, USA
Publication Date:
OSTI Identifier:
1228292
Grant/Contract Number:
Contract No. DE-AC02-98CH1-886
Type:
Publisher's Accepted Manuscript
Journal Name:
Physics of Plasmas
Additional Journal Information:
Journal Volume: 22; Journal Issue: 5; Journal ID: ISSN 1070-664X
Publisher:
American Institute of Physics
Sponsoring Org:
USDOE
Country of Publication:
United States
Language:
English