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Title: Control of ion energy distributions using phase shifting in multi-frequency capacitively coupled plasmas

Authors:
 [1] ;  [2] ;  [3] ;  [2] ;  [1]
  1. Department of Electrical Engineering and Computer Science, University of Michigan, 1301 Beal Ave, Ann Arbor, Michigan 48109, USA
  2. Nuclear Engineering Department, North Carolina State University, 2500 Stinson Drive, Raleigh, North Carolina 27695, USA
  3. MKS Instruments, Inc. 100 Highpower Road, Rochester, New York 14623, USA
Publication Date:
OSTI Identifier:
1228183
Grant/Contract Number:
SC0001319
Type:
Publisher's Accepted Manuscript
Journal Name:
Journal of Applied Physics
Additional Journal Information:
Journal Volume: 117; Journal Issue: 23; Journal ID: ISSN 0021-8979
Publisher:
American Institute of Physics
Sponsoring Org:
USDOE
Country of Publication:
United States
Language:
English