Stability and migration of small copper clusters in amorphous dielectrics

Guzman, David M.; Onofrio, Nicolas; Strachan, Alejandro

doi:10.1063/1.4921059

Title: Stability and migration of small copper clusters in amorphous dielectrics

Authors:

Guzman, David M. ^[1];

^[1]; Strachan, Alejandro ^[1]

School of Materials Engineering and Birck Nanotechnology Center, Purdue University, West Lafayette, Indiana 47907-2044, USA

Publication Date:: Mon May 18 00:00:00 EDT 2015

Sponsoring Org.:: USDOE

OSTI Identifier:: 1228179

Resource Type:: Publisher's Accepted Manuscript

Journal Name:: Journal of Applied Physics

Additional Journal Information:: Journal Name: Journal of Applied Physics Journal Volume: 117 Journal Issue: 19; Journal ID: ISSN 0021-8979

Publisher:: American Institute of Physics

Country of Publication:: United States

Language:: English

Citation Formats


                    Guzman, David M., Onofrio, Nicolas, and Strachan, Alejandro. Stability and migration of small copper clusters in amorphous dielectrics.  United States: N. p., 2015. 
Web.  doi:10.1063/1.4921059.

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                    Guzman, David M., Onofrio, Nicolas, & Strachan, Alejandro. Stability and migration of small copper clusters in amorphous dielectrics.  United States.  https://doi.org/10.1063/1.4921059

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                    Guzman, David M., Onofrio, Nicolas, and Strachan, Alejandro. Mon .  
"Stability and migration of small copper clusters in amorphous dielectrics".  United States.  https://doi.org/10.1063/1.4921059.

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@article{osti_1228179,

  title        = {Stability and migration of small copper clusters in amorphous dielectrics},

  author       = {Guzman, David M. and Onofrio, Nicolas and Strachan, Alejandro},

  abstractNote = {},

  doi          = {10.1063/1.4921059},

  journal      = {Journal of Applied Physics},

  number       = 19,

  volume       = 117,

  place        = {United States},

  year         = {Mon May 18 00:00:00 EDT 2015},

  month        = {Mon May 18 00:00:00 EDT 2015}

}

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Title: Stability and migration of small copper clusters in amorphous dielectrics

Citation Formats

Generalized Gradient Approximation Made Simple journal, October 1996

First principles studies on the growth of small Cu clusters and the dissociative chemisorption of H 2 journal, April 2006

Nanoionics-based resistive switching memories journal, November 2007

Nucleation and growth phenomena in nanosized electrochemical systems for resistive switching memories journal, October 2012

Effect of copper barrier dielectric deposition process on characterization of copper interconnect journal, May 2010

The synchronous-transit method for determining reaction pathways and locating molecular transition states journal, July 1977

Efficiency of ab-initio total energy calculations for metals and semiconductors using a plane-wave basis set journal, July 1996

Scaling limits of resistive memories journal, May 2011

Electrochemical metallization memories—fundamentals, applications, prospects journal, May 2011

Cation-based resistive memory conference, June 2011

Resistance switching of Cu/SiO2 memory cells studied under voltage and current-driven modes journal, May 2010

Ab initio study of Cu diffusion in α -cristobalite journal, November 2012

Bulk and surface nucleation processes in Ag 2 S conductance switches journal, September 2011

A Low Power Non-Volatile Memory Element Based on Copper in Deposited Silicon Oxide conference, November 2006

Efficient iterative schemes for ab initio total-energy calculations using a plane-wave basis set journal, October 1996

ReaxFF SiO Reactive Force Field for Silicon and Silicon Oxide Systems journal, May 2003

From ultrasoft pseudopotentials to the projector augmented-wave method journal, January 1999

Electrochemical metallization memories—fundamentals, applications, prospects journal, June 2011

Electrochemical dynamics of nanoscale metallic inclusions in dielectrics journal, June 2014

Fast Parallel Algorithms for Short-Range Molecular Dynamics journal, March 1995

Electrode kinetics of Cu–SiO2-based resistive switching cells: Overcoming the voltage-time dilemma of electrochemical metallization memories journal, February 2009

Evolution of Small Copper Clusters and Dissociative Chemisorption of Hydrogen journal, January 2005

A fast and robust algorithm for Bader decomposition of charge density journal, June 2006

Self-assembly of metal nanocrystals on ultrathin oxide for nonvolatile memory applications journal, January 2005

Nonequilibrium Equality for Free Energy Differences journal, April 1997

Narrow bandgap colloidal metal chalcogenide quantum dots: synthetic methods, heterostructures, assemblies, electronic and infrared optical properties journal, January 2013

Copper Transport in Thermal SiO[sub 2] journal, January 1993

Defect level distributions and atomic relaxations induced by charge trapping in amorphous silica journal, April 2012

Atomically controlled electrochemical nucleation at superionic solid electrolyte surfaces journal, April 2012

Nonvolatile Memory Concepts Based on Resistive Switching in Inorganic Materials journal, April 2009

A climbing image nudged elastic band method for finding saddle points and minimum energy paths journal, December 2000

Back-end-of-line compatible Conductive Bridging RAM based on Cu and SiO2 journal, May 2011

Influence of Cu diffusion conditions on the switching of Cu–SiO2-based resistive memory devices journal, April 2010

Improved tangent estimate in the nudged elastic band method for finding minimum energy paths and saddle points journal, December 2000

Prospects of Colloidal Nanocrystals for Electronic and Optoelectronic Applications journal, January 2010

Effect of topological disorder on structural, mechanical, and electronic properties of amorphous silicon nitride: An atomistic study journal, May 2012

Copper ion diffusion in porous and nonporous SiO2-based dielectrics using bias thermal stress and thermal stress tests journal, April 2008

Conductive Bridging Memory Development from Single Cells to 2Mbit Memory Arrays conference, November 2007

Formation of copper islands on a native SiO2 surface at elevated temperatures journal, March 2010

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Atomic origin of ultrafast resistance switching in nanoscale electrometallization cells journal, March 2015

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Diffusion of Metals in Silicon Dioxide journal, January 1986

Generalized Gradient Approximation Made Simple
journal, October 1996

First principles studies on the growth of small Cu clusters and the dissociative chemisorption of $H_{2}$
journal, April 2006

Nanoionics-based resistive switching memories
journal, November 2007

Nucleation and growth phenomena in nanosized electrochemical systems for resistive switching memories
journal, October 2012

Effect of copper barrier dielectric deposition process on characterization of copper interconnect
journal, May 2010

The synchronous-transit method for determining reaction pathways and locating molecular transition states
journal, July 1977

Efficiency of ab-initio total energy calculations for metals and semiconductors using a plane-wave basis set
journal, July 1996

Scaling limits of resistive memories
journal, May 2011

Electrochemical metallization memories—fundamentals, applications, prospects
journal, May 2011

Cation-based resistive memory
conference, June 2011

Resistance switching of Cu/SiO2 memory cells studied under voltage and current-driven modes
journal, May 2010

Ab initio study of Cu diffusion in α -cristobalite
journal, November 2012

Bulk and surface nucleation processes in Ag $_{2}$ S conductance switches
journal, September 2011

A Low Power Non-Volatile Memory Element Based on Copper in Deposited Silicon Oxide
conference, November 2006

Efficient iterative schemes for ab initio total-energy calculations using a plane-wave basis set
journal, October 1996

ReaxFF _SiO Reactive Force Field for Silicon and Silicon Oxide Systems
journal, May 2003

From ultrasoft pseudopotentials to the projector augmented-wave method
journal, January 1999

Electrochemical metallization memories—fundamentals, applications, prospects
journal, June 2011

Electrochemical dynamics of nanoscale metallic inclusions in dielectrics
journal, June 2014

Fast Parallel Algorithms for Short-Range Molecular Dynamics
journal, March 1995

Electrode kinetics of Cu–SiO2-based resistive switching cells: Overcoming the voltage-time dilemma of electrochemical metallization memories
journal, February 2009

Evolution of Small Copper Clusters and Dissociative Chemisorption of Hydrogen
journal, January 2005

A fast and robust algorithm for Bader decomposition of charge density
journal, June 2006

Self-assembly of metal nanocrystals on ultrathin oxide for nonvolatile memory applications
journal, January 2005

Nonequilibrium Equality for Free Energy Differences
journal, April 1997

Narrow bandgap colloidal metal chalcogenide quantum dots: synthetic methods, heterostructures, assemblies, electronic and infrared optical properties
journal, January 2013

Copper Transport in Thermal SiO[sub 2]
journal, January 1993

Defect level distributions and atomic relaxations induced by charge trapping in amorphous silica
journal, April 2012

Atomically controlled electrochemical nucleation at superionic solid electrolyte surfaces
journal, April 2012

Nonvolatile Memory Concepts Based on Resistive Switching in Inorganic Materials
journal, April 2009

A climbing image nudged elastic band method for finding saddle points and minimum energy paths
journal, December 2000

Back-end-of-line compatible Conductive Bridging RAM based on Cu and SiO2
journal, May 2011

Influence of Cu diffusion conditions on the switching of Cu–SiO2-based resistive memory devices
journal, April 2010

Improved tangent estimate in the nudged elastic band method for finding minimum energy paths and saddle points
journal, December 2000

Prospects of Colloidal Nanocrystals for Electronic and Optoelectronic Applications
journal, January 2010

Effect of topological disorder on structural, mechanical, and electronic properties of amorphous silicon nitride: An atomistic study
journal, May 2012

Copper ion diffusion in porous and nonporous SiO2-based dielectrics using bias thermal stress and thermal stress tests
journal, April 2008

Conductive Bridging Memory Development from Single Cells to 2Mbit Memory Arrays
conference, November 2007

Formation of copper islands on a native SiO2 surface at elevated temperatures
journal, March 2010

Bipolar and Unipolar Resistive Switching in Cu-Doped $ \hbox{SiO}_{2}$
journal, October 2007

Calculating potentials of mean force from steered molecular dynamics simulations
journal, April 2004

Atomic origin of ultrafast resistance switching in nanoscale electrometallization cells
journal, March 2015

Recent progress in redox-based resistive switching
conference, May 2012

Diffusion of Metals in Silicon Dioxide
journal, January 1986