Propagation direction reversal of ionization zones in the transition between high and low current magnetron sputtering
- Authors:
-
- School of Materials Science and Engineering, State Key Lab for Materials Processing and Die and Mold Technology, Huazhong University of Science and Technology, Wuhan 430074, China, Lawrence Berkeley National Laboratory, 1 Cyclotron Road, Berkeley, California 94720, USA
- Department of Physics, University of California Berkeley, Berkeley, California 94720, USA, Lawrence Berkeley National Laboratory, 1 Cyclotron Road, Berkeley, California 94720, USA
- School of Materials Science and Engineering, State Key Lab for Materials Processing and Die and Mold Technology, Huazhong University of Science and Technology, Wuhan 430074, China
- Lawrence Berkeley National Laboratory, 1 Cyclotron Road, Berkeley, California 94720, USA
- Publication Date:
- Sponsoring Org.:
- USDOE
- OSTI Identifier:
- 1226629
- Grant/Contract Number:
- AC02-05CH11231
- Resource Type:
- Publisher's Accepted Manuscript
- Journal Name:
- Applied Physics Letters
- Additional Journal Information:
- Journal Name: Applied Physics Letters Journal Volume: 105 Journal Issue: 25; Journal ID: ISSN 0003-6951
- Publisher:
- American Institute of Physics
- Country of Publication:
- United States
- Language:
- English
Citation Formats
Yang, Yuchen, Liu, Jason, Liu, Lin, and Anders, André. Propagation direction reversal of ionization zones in the transition between high and low current magnetron sputtering. United States: N. p., 2014.
Web. doi:10.1063/1.4905003.
Yang, Yuchen, Liu, Jason, Liu, Lin, & Anders, André. Propagation direction reversal of ionization zones in the transition between high and low current magnetron sputtering. United States. https://doi.org/10.1063/1.4905003
Yang, Yuchen, Liu, Jason, Liu, Lin, and Anders, André. Mon .
"Propagation direction reversal of ionization zones in the transition between high and low current magnetron sputtering". United States. https://doi.org/10.1063/1.4905003.
@article{osti_1226629,
title = {Propagation direction reversal of ionization zones in the transition between high and low current magnetron sputtering},
author = {Yang, Yuchen and Liu, Jason and Liu, Lin and Anders, André},
abstractNote = {},
doi = {10.1063/1.4905003},
journal = {Applied Physics Letters},
number = 25,
volume = 105,
place = {United States},
year = {Mon Dec 22 00:00:00 EST 2014},
month = {Mon Dec 22 00:00:00 EST 2014}
}
Free Publicly Available Full Text
Publisher's Version of Record
https://doi.org/10.1063/1.4905003
https://doi.org/10.1063/1.4905003
Other availability
Cited by: 35 works
Citation information provided by
Web of Science
Web of Science
Save to My Library
You must Sign In or Create an Account in order to save documents to your library.
Works referenced in this record:
Optical studies of plasma inhomogeneities in a high-current pulsed magnetron discharge
journal, July 2011
- Kozyrev, A. V.; Sochugov, N. S.; Oskomov, K. V.
- Plasma Physics Reports, Vol. 37, Issue 7
Anomalous electron transport in high power impulse magnetron sputtering
journal, March 2008
- Lundin, Daniel; Helmersson, Ulf; Kirkpatrick, Scott
- Plasma Sources Science and Technology, Vol. 17, Issue 2
Drifting potential humps in ionization zones: The “propeller blades” of high power impulse magnetron sputtering
journal, September 2013
- Anders, André; Panjan, Matjaž; Franz, Robert
- Applied Physics Letters, Vol. 103, Issue 14
Localized heating of electrons in ionization zones: Going beyond the Penning-Thornton paradigm in magnetron sputtering
journal, December 2014
- Anders, André
- Applied Physics Letters, Vol. 105, Issue 24
Electrostatic probe disruption of drift waves in magnetized microdischarges
journal, May 2009
- Ito, T.; Cappelli, M. A.
- Applied Physics Letters, Vol. 94, Issue 21
Faster-than-Bohm Cross- Electron Transport in Strongly Pulsed Plasmas
journal, November 2009
- Brenning, N.; Merlino, R. L.; Lundin, D.
- Physical Review Letters, Vol. 103, Issue 22
Asymmetric particle fluxes from drifting ionization zones in sputtering magnetrons
journal, March 2014
- Panjan, Matjaž; Franz, Robert; Anders, André
- Plasma Sources Science and Technology, Vol. 23, Issue 2
Drifting localization of ionization runaway: Unraveling the nature of anomalous transport in high power impulse magnetron sputtering
journal, March 2012
- Anders, André; Ni, Pavel; Rauch, Albert
- Journal of Applied Physics, Vol. 111, Issue 5
The characteristic shape of emission profiles of plasma spokes in HiPIMS: the role of secondary electrons
journal, February 2014
- Hecimovic, A.; Böke, M.; Winter, J.
- Journal of Physics D: Applied Physics, Vol. 47, Issue 10
Spokes and charged particle transport in HiPIMS magnetrons
journal, February 2013
- Brenning, N.; Lundin, D.; Minea, T.
- Journal of Physics D: Applied Physics, Vol. 46, Issue 8
Plasma flares in high power impulse magnetron sputtering
journal, November 2012
- Ni, Pavel A.; Hornschuch, Christian; Panjan, Matjaž
- Applied Physics Letters, Vol. 101, Issue 22
Experimental investigation of low-frequency waves propagating in a direct current planar magnetron plasma
journal, May 2004
- Martines, E.; Zuin, M.; Antoni, V.
- Physics of Plasmas, Vol. 11, Issue 5
High power impulse magnetron sputtering discharges: Instabilities and plasma self-organization
journal, March 2012
- Ehiasarian, A. P.; Hecimovic, A.; de los Arcos, T.
- Applied Physics Letters, Vol. 100, Issue 11
On sheath energization and Ohmic heating in sputtering magnetrons
journal, June 2013
- Huo, Chunqing; Lundin, Daniel; Raadu, Michael A.
- Plasma Sources Science and Technology, Vol. 22, Issue 4
Alfvén's critical ionization velocity observed in high power impulse magnetron sputtering discharges
journal, September 2012
- Brenning, N.; Lundin, D.
- Physics of Plasmas, Vol. 19, Issue 9