Propagation direction reversal of ionization zones in the transition between high and low current magnetron sputtering
- Authors:
-
[1];
[4]
- School of Materials Science and Engineering, State Key Lab for Materials Processing and Die and Mold Technology, Huazhong University of Science and Technology, Wuhan 430074, China, Lawrence Berkeley National Laboratory, 1 Cyclotron Road, Berkeley, California 94720, USA
- Department of Physics, University of California Berkeley, Berkeley, California 94720, USA, Lawrence Berkeley National Laboratory, 1 Cyclotron Road, Berkeley, California 94720, USA
- School of Materials Science and Engineering, State Key Lab for Materials Processing and Die and Mold Technology, Huazhong University of Science and Technology, Wuhan 430074, China
- Lawrence Berkeley National Laboratory, 1 Cyclotron Road, Berkeley, California 94720, USA
- Publication Date:
- Sponsoring Org.:
- USDOE
- OSTI Identifier:
- 1226629
- Grant/Contract Number:
- AC02-05CH11231
- Resource Type:
- Publisher's Accepted Manuscript
- Journal Name:
- Applied Physics Letters
- Additional Journal Information:
- Journal Name: Applied Physics Letters Journal Volume: 105 Journal Issue: 25; Journal ID: ISSN 0003-6951
- Publisher:
- American Institute of Physics
- Country of Publication:
- United States
- Language:
- English
Citation Formats
Yang, Yuchen, Liu, Jason, Liu, Lin, and Anders, André. Propagation direction reversal of ionization zones in the transition between high and low current magnetron sputtering. United States: N. p., 2014.
Web. doi:10.1063/1.4905003.
Yang, Yuchen, Liu, Jason, Liu, Lin, & Anders, André. Propagation direction reversal of ionization zones in the transition between high and low current magnetron sputtering. United States. https://doi.org/10.1063/1.4905003
Yang, Yuchen, Liu, Jason, Liu, Lin, and Anders, André. Mon .
"Propagation direction reversal of ionization zones in the transition between high and low current magnetron sputtering". United States. https://doi.org/10.1063/1.4905003.
@article{osti_1226629,
title = {Propagation direction reversal of ionization zones in the transition between high and low current magnetron sputtering},
author = {Yang, Yuchen and Liu, Jason and Liu, Lin and Anders, André},
abstractNote = {},
doi = {10.1063/1.4905003},
journal = {Applied Physics Letters},
number = 25,
volume = 105,
place = {United States},
year = {Mon Dec 22 00:00:00 EST 2014},
month = {Mon Dec 22 00:00:00 EST 2014}
}
Free Publicly Available Full Text
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https://doi.org/10.1063/1.4905003
https://doi.org/10.1063/1.4905003
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Cited by: 35 works
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Works referenced in this record:
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