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This content will become publicly available on November 19, 2016

Title: High-resolution subsurface microscopy of CMOS integrated circuits using radially polarized light

Authors:
; ; ; ; ; ;
Publication Date:
OSTI Identifier:
1226398
Grant/Contract Number:
NA0001944
Type:
Publisher's Accepted Manuscript
Journal Name:
Optics Letters
Additional Journal Information:
Journal Volume: 40; Journal Issue: 23; Journal ID: ISSN 0146-9592
Publisher:
Optical Society of America
Sponsoring Org:
USDOE
Country of Publication:
United States
Language:
English