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This content will become publicly available on November 13, 2016

Title: Sub-10 nm nanopantography

Authors:
 [1] ;  [1] ;  [2] ;  [1]
  1. Plasma Processing Laboratory, Department of Chemical and Biomolecular Engineering, University of Houston, Houston, Texas 77204, USA
  2. Department of Electrical and Computer Engineering, University of Houston, Houston, Texas 77204, USA
Publication Date:
OSTI Identifier:
1225986
Grant/Contract Number:
SC0001939
Type:
Publisher's Accepted Manuscript
Journal Name:
Applied Physics Letters
Additional Journal Information:
Journal Volume: 107; Journal Issue: 19; Journal ID: ISSN 0003-6951
Publisher:
American Institute of Physics
Sponsoring Org:
USDOE
Country of Publication:
United States
Language:
English