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Title: A modular reactor design for in situ synchrotron x-ray investigation of atomic layer deposition processes

Authors:
 [1] ;  [2] ;  [1] ;  [3] ;  [4] ;  [4] ;  [1] ;  [3] ;  [5] ;  [1]
  1. Materials Science Division, Argonne National Laboratory, Argonne, Illinois 60439, USA
  2. Materials Science Division, Argonne National Laboratory, Argonne, Illinois 60439, USA, Department of Chemistry, Illinois Institute of Technology, Chicago, Illinois 60616, USA
  3. Energy Systems Division, Argonne National Laboratory, Argonne, Illinois 60439, USA
  4. X-ray Science Division, Argonne National Laboratory, Argonne, Illinois 60439, USA
  5. Department of Chemistry, Illinois Institute of Technology, Chicago, Illinois 60616, USA, Chemical Science and Engineering Division, Argonne National Laboratory, Argonne, Illinois 60439, USA
Publication Date:
OSTI Identifier:
1224877
Grant/Contract Number:
AC02-06CH11357; SC0001059
Type:
Publisher's Accepted Manuscript
Journal Name:
Review of Scientific Instruments
Additional Journal Information:
Journal Volume: 86; Journal Issue: 11; Journal ID: ISSN 0034-6748
Publisher:
American Institute of Physics
Sponsoring Org:
USDOE
Country of Publication:
United States
Language:
English