A modular reactor design for in situ synchrotron x-ray investigation of atomic layer deposition processes
Abstract
Synchrotron characterization techniques provide some of the most powerful tools for the study of film structure and chemistry. The brilliance and tunability of the Advanced Photon Source allow access to scattering and spectroscopic techniques unavailable with in-house laboratory setups and provide the opportunity to probe various atomic layer deposition (ALD) processes in situ starting at the very first deposition cycle. In this work, we present the design and implementation of a portable ALD instrument which possesses a modular reactor scheme that enables simple experimental switchover between various beamlines and characterization techniques. We present in situ results for (1) X-ray surface scattering and reflectivity measurements of epitaxial ZnO ALD on sapphire, (2) grazing-incidence small angle scattering of MnO nucleation on silicon, and (3) grazing-incidence X-ray absorption spectroscopy of nucleation-regime Er2O3 ALD on amorphous ALD alumina and single crystalline sapphire.
- Authors:
-
[3];
[4];
- Argonne National Lab. (ANL), Argonne, IL (United States). Materials Science Division
- Argonne National Lab. (ANL), Argonne, IL (United States). Materials Science Division; Illinois Inst. of Technology, Chicago, IL (United States). Dept. of Chemistry
- Argonne National Lab. (ANL), Argonne, IL (United States). Energy Systems Division
- Argonne National Lab. (ANL), Argonne, IL (United States). X-Ray Science Division
- Illinois Inst. of Technology, Chicago, IL (United States). Dept. of Chemistry; Argonne National Lab. (ANL), Argonne, IL (United States). Chemical Science and Engineering Division
- Publication Date:
- Research Org.:
- Energy Frontier Research Centers (EFRC), Washington D.C. (United States). Argonne-Northwestern Solar Energy Research Center (ANSER)
- Sponsoring Org.:
- USDOE Office of Science (SC), Basic Energy Sciences (BES)
- OSTI Identifier:
- 1370820
- Alternate Identifier(s):
- OSTI ID: 1224877
- Grant/Contract Number:
- SC0001059; AC02-06CH11357
- Resource Type:
- Accepted Manuscript
- Journal Name:
- Review of Scientific Instruments
- Additional Journal Information:
- Journal Volume: 86; Journal Issue: 11; Related Information: ANSER partners with Northwestern University (lead); Argonne National Laboratory; University of Chicago; University of Illinois, Urbana-Champaign; Yale University; Journal ID: ISSN 0034-6748
- Publisher:
- American Institute of Physics (AIP)
- Country of Publication:
- United States
- Language:
- English
- Subject:
- 46 INSTRUMENTATION RELATED TO NUCLEAR SCIENCE AND TECHNOLOGY; 75 CONDENSED MATTER PHYSICS, SUPERCONDUCTIVITY AND SUPERFLUIDITY; catalysis (homogeneous); catalysis (heterogeneous); solar (photovoltaic); solar (fuels); photosynthesis (natural and artificial); bio-inspired; hydrogen and fuel cells; electrodes - solar; defects; charge transport; spin dynamics; membrane; materials and chemistry by design; optics; synthesis (novel materials); synthesis (self-assembly)
Citation Formats
Klug, Jeffrey A., Weimer, Matthew S., Emery, Jonathan D., Yanguas-Gil, Angel, Seifert, Sönke, Schlepütz, Christian M., Martinson, Alex B. F., Elam, Jeffrey W., Hock, Adam S., and Proslier, Thomas. A modular reactor design for in situ synchrotron x-ray investigation of atomic layer deposition processes. United States: N. p., 2015.
Web. doi:10.1063/1.4934807.
Klug, Jeffrey A., Weimer, Matthew S., Emery, Jonathan D., Yanguas-Gil, Angel, Seifert, Sönke, Schlepütz, Christian M., Martinson, Alex B. F., Elam, Jeffrey W., Hock, Adam S., & Proslier, Thomas. A modular reactor design for in situ synchrotron x-ray investigation of atomic layer deposition processes. United States. https://doi.org/10.1063/1.4934807
Klug, Jeffrey A., Weimer, Matthew S., Emery, Jonathan D., Yanguas-Gil, Angel, Seifert, Sönke, Schlepütz, Christian M., Martinson, Alex B. F., Elam, Jeffrey W., Hock, Adam S., and Proslier, Thomas. Mon .
"A modular reactor design for in situ synchrotron x-ray investigation of atomic layer deposition processes". United States. https://doi.org/10.1063/1.4934807. https://www.osti.gov/servlets/purl/1370820.
@article{osti_1370820,
title = {A modular reactor design for in situ synchrotron x-ray investigation of atomic layer deposition processes},
author = {Klug, Jeffrey A. and Weimer, Matthew S. and Emery, Jonathan D. and Yanguas-Gil, Angel and Seifert, Sönke and Schlepütz, Christian M. and Martinson, Alex B. F. and Elam, Jeffrey W. and Hock, Adam S. and Proslier, Thomas},
abstractNote = {Synchrotron characterization techniques provide some of the most powerful tools for the study of film structure and chemistry. The brilliance and tunability of the Advanced Photon Source allow access to scattering and spectroscopic techniques unavailable with in-house laboratory setups and provide the opportunity to probe various atomic layer deposition (ALD) processes in situ starting at the very first deposition cycle. In this work, we present the design and implementation of a portable ALD instrument which possesses a modular reactor scheme that enables simple experimental switchover between various beamlines and characterization techniques. We present in situ results for (1) X-ray surface scattering and reflectivity measurements of epitaxial ZnO ALD on sapphire, (2) grazing-incidence small angle scattering of MnO nucleation on silicon, and (3) grazing-incidence X-ray absorption spectroscopy of nucleation-regime Er2O3 ALD on amorphous ALD alumina and single crystalline sapphire.},
doi = {10.1063/1.4934807},
journal = {Review of Scientific Instruments},
number = 11,
volume = 86,
place = {United States},
year = {Mon Nov 02 00:00:00 EST 2015},
month = {Mon Nov 02 00:00:00 EST 2015}
}
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