Facile electron-beam lithography technique for irregular and fragile substrates

Chang, Jiyoung; Zhou, Qin; Zettl, Alex

doi:10.1063/1.4900505

Title: Facile electron-beam lithography technique for irregular and fragile substrates

Authors:

Chang, Jiyoung ^[1]; Zhou, Qin ^[1]; Zettl, Alex ^[1]

Department of Physics, University of California at Berkeley, Berkeley, California 94720, USA, Materials Sciences Division, Lawrence Berkeley National Laboratory, Berkeley, California 94720, USA, Kavli Energy NanoSciences Institute at the University of California, Berkeley, California 94720, USA

Publication Date:: Wed Oct 29 00:00:00 EDT 2014

Sponsoring Org.:: USDOE

OSTI Identifier:: 1224258

Grant/Contract Number:: AC02-05CH11231

Resource Type:: Publisher's Accepted Manuscript

Journal Name:: Applied Physics Letters

Additional Journal Information:: Journal Name: Applied Physics Letters Journal Volume: 105 Journal Issue: 17; Journal ID: ISSN 0003-6951

Publisher:: American Institute of Physics

Country of Publication:: United States

Language:: English

Citation Formats


                    Chang, Jiyoung, Zhou, Qin, and Zettl, Alex. Facile electron-beam lithography technique for irregular and fragile substrates.  United States: N. p., 2014. 
Web.  doi:10.1063/1.4900505.

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                    Chang, Jiyoung, Zhou, Qin, & Zettl, Alex. Facile electron-beam lithography technique for irregular and fragile substrates.  United States.  https://doi.org/10.1063/1.4900505

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                    Chang, Jiyoung, Zhou, Qin, and Zettl, Alex. Wed .  
"Facile electron-beam lithography technique for irregular and fragile substrates".  United States.  https://doi.org/10.1063/1.4900505.

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@article{osti_1224258,

  title        = {Facile electron-beam lithography technique for irregular and fragile substrates},

  author       = {Chang, Jiyoung and Zhou, Qin and Zettl, Alex},

  abstractNote = {},

  doi          = {10.1063/1.4900505},

  journal      = {Applied Physics Letters},

  number       = 17,

  volume       = 105,

  place        = {United States},

  year         = {Wed Oct 29 00:00:00 EDT 2014},

  month        = {Wed Oct 29 00:00:00 EDT 2014}

}

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Title: Facile electron-beam lithography technique for irregular and fragile substrates

Citation Formats

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