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Title: Micrometer-scale fabrication of complex three dimensional lattice + basis structures in silicon

Authors:
; ; ; ;
Publication Date:
OSTI Identifier:
1222237
Type:
Published Article
Journal Name:
Optical Materials Express
Additional Journal Information:
Journal Volume: 5; Journal Issue: 10; Journal ID: ISSN 2159-3930
Publisher:
Optical Society of America
Sponsoring Org:
USDOE
Country of Publication:
United States
Language:
English