Femtosecond laser ablation-based mass spectrometry. An ideal tool for stoichiometric analysis of thin films
An accurate and routinely available method for stoichiometric analysis of thin films is a desideratum of modern materials science where a material’s properties depend sensitively on elemental composition. We thoroughly investigated femtosecond laser ablation-inductively coupled plasma-mass spectrometry (fs-LA-ICP-MS) as an analytical technique for determination of the stoichiometry of thin films down to the nanometer scale. The use of femtosecond laser ablation allows for precise removal of material with high spatial and depth resolution that can be coupled to an ICP-MS to obtain elemental and isotopic information. We used molecular beam epitaxy-grown thin films of LaPd(x)Sb2 and T´-La2CuO4 to demonstrate the capacity of fs-LA-ICP-MS for stoichiometric analysis and the spatial and depth resolution of the technique. Here we demonstrate that the stoichiometric information of thin films with a thickness of ~10 nm or lower can be determined. Furthermore, our results indicate that fs-LA-ICP-MS provides precise information on the thin film-substrate interface and is able to detect the interdiffusion of cations.
- Pacific Northwest National Lab. (PNNL), Richland, WA (United States); Purdue University, West Lafayette, IN (United States). School of Nuclear Engineering.
- Technische Universität Darmstadt, Darmstadt (Germany). Institute for Materials Science.
- Purdue University, West Lafayette, IN (United States). School of Nuclear Engineering.
- Pacific Northwest National Lab. (PNNL), Richland, WA (United States)
- Publication Date:
- OSTI Identifier:
- Report Number(s):
Journal ID: ISSN 2045-2322; srep13121
- Grant/Contract Number:
- Accepted Manuscript
- Journal Name:
- Scientific Reports
- Additional Journal Information:
- Journal Volume: 5; Journal ID: ISSN 2045-2322
- Nature Publishing Group
- Research Org:
- Pacific Northwest National Laboratory (PNNL), Richland, WA (United States)
- Sponsoring Org:
- USDOE National Nuclear Security Administration (NNSA) Office of Nonproliferation and Verification Research and Development (NA-22), Laboratory Directed Research and Development (LDRD); U.S. National Science Foundation
- Country of Publication:
- United States
- 75 CONDENSED MATTER PHYSICS, SUPERCONDUCTIVITY AND SUPERFLUIDITY mass spectrometry; nanoscale materials