Element- and charge-state-resolved ion energies in the cathodic arc plasma from composite AlCr cathodes in argon, nitrogen and oxygen atmospheres

Franz, Robert; Polcik, Peter; Anders, André

doi:10.1016/j.surfcoat.2015.03.047

Title: Element- and charge-state-resolved ion energies in the cathodic arc plasma from composite AlCr cathodes in argon, nitrogen and oxygen atmospheres

Abstract

The energy distribution functions of ions in the cathodic arc plasma using composite AlCr cathodes were measured as a function of the background gas pressure in the range 0.5 to 3.5 Pa for different cathode compositions and gas atmospheres. The most abundant aluminium ions were Al+ regardless of the background gas species, whereas Cr²⁺ ions were dominating in Ar and N₂ and Cr⁺ in O₂ atmospheres. The energy distributions of the aluminium and chromium ions typically consisted of a high-energy fraction due to acceleration in the expanding plasma plume from the cathode spot and thermalised ions that were subjected to collisions in the plasma cloud. The fraction of the latter increased with increasing background gas pressure. Atomic nitrogen and oxygen ions showed similar energy distributions as the aluminium and chromium ions, whereas the argon and molecular nitrogen and oxygen ions were formed at greater distance from the cathode spot and thus less subject to accelerating gradients. In addition to the positively charged metal and gas ions, negatively charged oxygen and oxygen-containing ions were observed in O₂ atmosphere. The obtained results are intended to provide a comprehensive overview of the ion energies and charge states in the arc plasma of AlCrmore »« less

Authors:

; Polcik, Peter; Anders, André

Publication Date:: Mon Jun 01 00:00:00 EDT 2015

Research Org.:: Lawrence Berkeley National Lab. (LBNL), Berkeley, CA (United States)

Sponsoring Org.:: USDOE

OSTI Identifier:: 1247609

Alternate Identifier(s):: OSTI ID: 1208606

Grant/Contract Number:: AC02-05CH11231

Resource Type:: Published Article

Journal Name:: Surface and Coatings Technology

Additional Journal Information:: Journal Name: Surface and Coatings Technology Journal Volume: 272 Journal Issue: C; Journal ID: ISSN 0257-8972

Publisher:: Elsevier

Country of Publication:: Netherlands

Language:: English

Subject:: 71 CLASSICAL AND QUANTUM MECHANICS, GENERAL PHYSICS; 36 MATERIALS SCIENCE; AlCr; Cathodic arc; Ion energy distribution function; Composite cathode; Background gas

Citation Formats


                    Franz, Robert, Polcik, Peter, and Anders, André. Element- and charge-state-resolved ion energies in the cathodic arc plasma from composite AlCr cathodes in argon, nitrogen and oxygen atmospheres.  Netherlands: N. p., 2015. 
Web.  doi:10.1016/j.surfcoat.2015.03.047.

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                    Franz, Robert, Polcik, Peter, & Anders, André. Element- and charge-state-resolved ion energies in the cathodic arc plasma from composite AlCr cathodes in argon, nitrogen and oxygen atmospheres.  Netherlands.  https://doi.org/10.1016/j.surfcoat.2015.03.047

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                    Franz, Robert, Polcik, Peter, and Anders, André. Mon .  
"Element- and charge-state-resolved ion energies in the cathodic arc plasma from composite AlCr cathodes in argon, nitrogen and oxygen atmospheres".  Netherlands.  https://doi.org/10.1016/j.surfcoat.2015.03.047.

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@article{osti_1247609,

  title        = {Element- and charge-state-resolved ion energies in the cathodic arc plasma from composite AlCr cathodes in argon, nitrogen and oxygen atmospheres},

  author       = {Franz, Robert and Polcik, Peter and Anders, André},

  abstractNote = {The energy distribution functions of ions in the cathodic arc plasma using composite AlCr cathodes were measured as a function of the background gas pressure in the range 0.5 to 3.5 Pa for different cathode compositions and gas atmospheres. The most abundant aluminium ions were Al+ regardless of the background gas species, whereas Cr2+ ions were dominating in Ar and N2 and Cr+ in O2 atmospheres. The energy distributions of the aluminium and chromium ions typically consisted of a high-energy fraction due to acceleration in the expanding plasma plume from the cathode spot and thermalised ions that were subjected to collisions in the plasma cloud. The fraction of the latter increased with increasing background gas pressure. Atomic nitrogen and oxygen ions showed similar energy distributions as the aluminium and chromium ions, whereas the argon and molecular nitrogen and oxygen ions were formed at greater distance from the cathode spot and thus less subject to accelerating gradients. In addition to the positively charged metal and gas ions, negatively charged oxygen and oxygen-containing ions were observed in O2 atmosphere. The obtained results are intended to provide a comprehensive overview of the ion energies and charge states in the arc plasma of AlCr composite cathodes in different gas atmospheres as such plasmas are frequently used to deposit thin films and coatings.},

  doi          = {10.1016/j.surfcoat.2015.03.047},

  journal      = {Surface and Coatings Technology},

  number       = C,

  volume       = 272,

  place        = {Netherlands},

  year         = {Mon Jun 01 00:00:00 EDT 2015},

  month        = {Mon Jun 01 00:00:00 EDT 2015}

}

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Works referencing / citing this record:

Influence of Ar gas pressure on ion energy and charge state distributions in pulsed cathodic arc plasmas from Nb–Al cathodes studied with high time resolution
journal, November 2018

Zöhrer, Siegfried; Anders, André; Franz, Robert
Journal of Physics D: Applied Physics, Vol. 52, Issue 5
DOI: 10.1088/1361-6463/aaeecc

Time-resolved ion energy and charge state distributions in pulsed cathodic arc plasmas of Nb−Al cathodes in high vacuum
journal, May 2018

Zöhrer, Siegfried; Anders, André; Franz, Robert
Plasma Sources Science and Technology, Vol. 27, Issue 5
DOI: 10.1088/1361-6595/aabdc7

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Title: Element- and charge-state-resolved ion energies in the cathodic arc plasma from composite AlCr cathodes in argon, nitrogen and oxygen atmospheres

Abstract

Citation Formats

Influence of Ar gas pressure on ion energy and charge state distributions in pulsed cathodic arc plasmas from Nb–Al cathodes studied with high time resolution journal, November 2018

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