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Title: Scanning Optical Head with Nontilted Reference Beam: Assuring Nanoradian Accuracy for a New Generation Surface Profiler in the Large-Slope Testing Range

Nanoradian Surface Profilers (NSPs) are required for state-of-the-art synchrotron radiation optics and high-precision optical measurements. Nano-radian accuracy must be maintained in the large-angle test range. However, the beams' notable lateral motions during tests of most operating profilers, combined with the insufficiencies of their optical components, generate significant errors of 1  μ rad rms in the measurements. The solution to nano-radian accuracy for the new generation of surface profilers in this range is to apply a scanning optical head, combined with nontilted reference beam. I describe here my comparison of different scan modes and discuss some test results.
Authors:
 [1]
  1. Instrumentation Division, Brookhaven National Laboratory, Upton, NY 11973, USA
Publication Date:
OSTI Identifier:
1198047
Grant/Contract Number:
AC02-98CH10886
Type:
Published Article
Journal Name:
International Journal of Optics
Additional Journal Information:
Journal Volume: 2011; Related Information: CHORUS Timestamp: 2016-08-04 12:14:04; Journal ID: ISSN 1687-9384
Publisher:
Hindawi Publishing Corporation
Sponsoring Org:
USDOE
Country of Publication:
Country unknown/Code not available
Language:
English