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Title: Plastic Deformation in Profile-Coated Elliptical KB Mirrors

Profile coating has been successfully applied to produce elliptical Kirkpatrick-Baez (KB) mirrors using both cylindrical and flat Si substrates. Previously, focusing widths of 70 nm with 15-keV monochromatic and 80 nm with white beam were achieved using a flat Si substrate. Now, precision elliptical KB mirrors with sub-nm figure errors are produced with both Au and Pt coatings on flat substrates. Recent studies of bare Si-, Au-, and Pt-coated KB mirrors under prolonged synchrotron X-ray radiation and low-temperature vacuum annealing will be discussed in terms of film stress relaxation and Si plastic deformation.
Authors:
 [1] ;  [2] ;  [1] ;  [3] ;  [1] ;  [1] ;  [1] ;  [4] ;  [1]
  1. X-ray Science Division, Argonne National Laboratory, Argonne, IL 60439, USA
  2. National Synchrotron Light Source II, Brookhaven National Laboratory, Upton, NY 11973, USA
  3. Synchrotron Soleil, BP 48 Saint-Aubin, 91192 Gif-sur-Yvette, France
  4. Materials Science and Technology Division, Oak Ridge National Laboratory, Oak Ridge, TN 37831, USA
Publication Date:
OSTI Identifier:
1197880
Grant/Contract Number:
AC02-06CH11357
Type:
Published Article
Journal Name:
ISRN Optics
Additional Journal Information:
Journal Volume: 2012; Related Information: CHORUS Timestamp: 2016-08-02 12:32:57; Journal ID: ISSN 2090-7826
Publisher:
Hindawi (International Scholarly Research Network)
Sponsoring Org:
USDOE
Country of Publication:
Country unknown/Code not available
Language:
English