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Title: A brief review of atomic layer deposition: from fundamentals to applications

Authors:
; ;
Publication Date:
OSTI Identifier:
1197715
Type:
Published Article
Journal Name:
Materials Today
Additional Journal Information:
Journal Volume: 17; Journal Issue: 5; Journal ID: ISSN 1369-7021
Publisher:
Elsevier
Sponsoring Org:
USDOE
Country of Publication:
United Kingdom
Language:
English