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Title: Electron-stimulated purification of platinum nanostructures grown via focused electron beam induced deposition

In this paper, platinum–carbon nanostructures deposited via electron beam induced deposition from MeCpPt(IV)Me3 are purified during a post-deposition electron exposure treatment in a localized oxygen ambient at room temperature. Time-dependent studies demonstrate that the process occurs from the top–down. Electron beam energy and current studies demonstrate that the process is controlled by a confluence of the electron energy loss and oxygen concentration. Furthermore, the experimental results are modeled as a 2nd order reaction which is dependent on both the electron energy loss density and the oxygen concentration. Finally, in addition to purification, the post-deposition electron stimulated oxygen purification process enhances the resolution of the EBID process due to the isotropic carbon removal from the as-deposited materials which produces high-fidelity shape retention.
Authors:
 [1] ;  [1] ;  [2] ;  [3] ;  [4] ;  [2]
  1. Univ. of Tennessee, Knoxville, TN (United States). Materials Science and Engineering Dept.
  2. Univ. of Tennessee, Knoxville, TN (United States). Materials Science and Engineering Dept.; Oak Ridge National Lab. (ORNL), Oak Ridge, TN (United States). Nanofabrication Research Lab., Center for Nanophase Materials Sciences
  3. Oak Ridge National Lab. (ORNL), Oak Ridge, TN (United States). Nanofabrication Research Lab., Center for Nanophase Materials Sciences
  4. Graz Univ. of Technology, Steyrergasse (Austria). Inst. for Electron Microscopy and Nanoanalysis
Publication Date:
OSTI Identifier:
1185887
Grant/Contract Number:
AC05-00OR22725
Type:
Accepted Manuscript
Journal Name:
Beilstein Journal of Nanotechnology
Additional Journal Information:
Journal Volume: 6; Journal ID: ISSN 2190-4286
Publisher:
Beilstein Institute
Research Org:
Oak Ridge National Lab. (ORNL), Oak Ridge, TN (United States)
Sponsoring Org:
USDOE Office of Science (SC)
Country of Publication:
United States
Language:
English
Subject:
36 MATERIALS SCIENCE beam induced processing; direct-write; electron beam induced deposition; nano