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Title: Thickness determination of few-layer hexagonal boron nitride films by scanning electron microscopy and Auger electron spectroscopy

Authors:
 [1] ;  [1]
  1. Center for Functional Nanomaterials, Brookhaven National Laboratory, Upton, New York 11973, USA
Publication Date:
OSTI Identifier:
1179631
Grant/Contract Number:
AC02–98CH10886
Type:
Published Article
Journal Name:
APL MATERIALS
Additional Journal Information:
Journal Volume: 2; Journal Issue: 9; Journal ID: ISSN 2166-532X
Publisher:
American Institute of Physics
Sponsoring Org:
USDOE
Country of Publication:
United States
Language:
English