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Title: Performance and characterization of a MEMS-based device for alignment and manipulation of x-ray nanofocusing optics

Authors:
 [1] ;  [1] ;  [1] ;  [2] ;  [1] ;  [1]
  1. Brookhaven National Laboratory, Upton, NY, 11973 USA
  2. Mirrorcle Technologies, Inc., Richmond, CA, 94804 USA
Publication Date:
OSTI Identifier:
1176975
Grant/Contract Number:
AC02-98CH10886
Type:
Published Article
Journal Name:
AIP Advances
Additional Journal Information:
Journal Volume: 5; Journal Issue: 3; Journal ID: ISSN 2158-3226
Publisher:
American Institute of Physics
Sponsoring Org:
USDOE
Country of Publication:
United States
Language:
English