Surface acoustic wave devices for harsh environment wireless sensing
Abstract
In this study, langasite surface acoustic wave devices can be used to implement harsh environment wireless sensing of gas concentration and temperature. This paper reviews prior work on the development of langasite surface acoustic wave devices, followed by a report of recent progress toward the implementation of oxygen gas sensors. Resistive metal oxide films can be used as the oxygen sensing film, although development of an adherent barrier layer will be necessary with the sensing layers studied here to prevent interaction with the langasite substrate. Experimental results are presented for the performance of a langasite surface acoustic wave oxygen sensor with tin oxide sensing layer, and these experimental results are correlated with direct measurements of the sensing layer resistivity.
- Authors:
-
- National Energy Technology Lab. (NETL), Pittsburgh, PA, (United States); Carnegie Mellon Univ., Pittsburgh, PA (United States)
- National Energy Technology Lab. (NETL), Pittsburgh, PA, (United States)
- Publication Date:
- Research Org.:
- National Energy Technology Laboratory (NETL), Pittsburgh, PA, Morgantown, WV (United States)
- Sponsoring Org.:
- USDOE Office of Fossil Energy (FE)
- OSTI Identifier:
- 1127089
- Report Number(s):
- A-UNIV-PUB-004
Journal ID: ISSN 1424-8220; SENSC9
- Grant/Contract Number:
- FE0004000
- Resource Type:
- Accepted Manuscript
- Journal Name:
- Sensors
- Additional Journal Information:
- Journal Volume: 13; Journal Issue: 6; Journal ID: ISSN 1424-8220
- Publisher:
- MDPI AG
- Country of Publication:
- United States
- Language:
- English
- Subject:
- 47 OTHER INSTRUMENTATION; sensing; surface acoustic wave; gas sensor; oxygen; langasite; zinc oxide; tin oxide
Citation Formats
Greve, David W., Chin, Tao -Lun, Zheng, Peng, Ohodnicki, Paul, Baltrus, John, and Oppenheim, Irving J. Surface acoustic wave devices for harsh environment wireless sensing. United States: N. p., 2013.
Web. doi:10.3390/s130606910.
Greve, David W., Chin, Tao -Lun, Zheng, Peng, Ohodnicki, Paul, Baltrus, John, & Oppenheim, Irving J. Surface acoustic wave devices for harsh environment wireless sensing. United States. https://doi.org/10.3390/s130606910
Greve, David W., Chin, Tao -Lun, Zheng, Peng, Ohodnicki, Paul, Baltrus, John, and Oppenheim, Irving J. Fri .
"Surface acoustic wave devices for harsh environment wireless sensing". United States. https://doi.org/10.3390/s130606910. https://www.osti.gov/servlets/purl/1127089.
@article{osti_1127089,
title = {Surface acoustic wave devices for harsh environment wireless sensing},
author = {Greve, David W. and Chin, Tao -Lun and Zheng, Peng and Ohodnicki, Paul and Baltrus, John and Oppenheim, Irving J.},
abstractNote = {In this study, langasite surface acoustic wave devices can be used to implement harsh environment wireless sensing of gas concentration and temperature. This paper reviews prior work on the development of langasite surface acoustic wave devices, followed by a report of recent progress toward the implementation of oxygen gas sensors. Resistive metal oxide films can be used as the oxygen sensing film, although development of an adherent barrier layer will be necessary with the sensing layers studied here to prevent interaction with the langasite substrate. Experimental results are presented for the performance of a langasite surface acoustic wave oxygen sensor with tin oxide sensing layer, and these experimental results are correlated with direct measurements of the sensing layer resistivity.},
doi = {10.3390/s130606910},
journal = {Sensors},
number = 6,
volume = 13,
place = {United States},
year = {Fri May 24 00:00:00 EDT 2013},
month = {Fri May 24 00:00:00 EDT 2013}
}
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