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Title: Nanoindentation of high-aspect ratio pillar structures on optical multilayer dielectric diffraction gratings

Authors:
; ; ;
Publication Date:
OSTI Identifier:
1114949
Grant/Contract Number:
FC52-08NA28302
Type:
Published Article
Journal Name:
AIP Advances
Additional Journal Information:
Journal Volume: 1; Journal Issue: 4; Journal ID: ISSN 2158-3226
Publisher:
American Institute of Physics
Sponsoring Org:
USDOE
Country of Publication:
United States
Language:
English