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Title: Solution-Based Synthesis of Crystalline Silicon from Liquid Silane through Laser and Chemical Annealing

We report a solution process for the synthesis of crystalline silicon from the liquid silane precursor cyclohexasilane (Si6H12). Polysilane films were crystallized through thermal and laser annealing, with plasma hydrogenation at atmospheric pressure generating further structural changes in the films. The evolution from amorphous to microcrystalline is characterized using scanning electron microscopy (SEM), atomic force microscopy (AFM), Raman spectroscopy and impedance spectroscopy. A four-decade enhancement in the electrical conductivity is attributed to a disorder-order transition in a bonded Si network. Lastly, our results demonstrate a potentially attractive approach that employs a solution process coupled with ambient post-processing to produce crystalline silicon thin films.
Authors:
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Publication Date:
OSTI Identifier:
1046826
Report Number(s):
DOE/GO/88160--44
Journal ID: ISSN 1944-8244
Grant/Contract Number:
FG36-08GO88160
Type:
Accepted Manuscript
Journal Name:
ACS Applied Materials and Interfaces
Additional Journal Information:
Journal Volume: 4; Journal Issue: 5; Journal ID: ISSN 1944-8244
Publisher:
American Chemical Society
Research Org:
North Dakota State Univ., Fargo, ND (United States)
Sponsoring Org:
USDOE Office of Energy Efficiency and Renewable Energy (EERE)
Country of Publication:
United States
Language:
English
Subject:
36 MATERIALS SCIENCE silicon; liquid silane; laser crystallization; plasma annealing