- 2322 ieee transactions on ultrasonics, ferroelectrics, and frequency control, vol. 52, no. 12, december 2005 Phase Noise in Capacitively Coupled
- IEEE ELECTRON DEVICE LETTERS, VOL. 25, NO. 4, APRIL 2004 173 Square-Extensional Mode Single-Crystal Silicon
- 2001 IEEE Inernational Ultrasonics Symposium Atlanta, USA, Oct. 7-10, 2001, pp. 541-544
- 1666 IEEE TRANSACTIONS ON MICROWAVE THEORY AND TECHNIQUES, VOL. 55, NO. 8, AUGUST 2007 Variable Antenna Load for Transmitter
- 2484 ieee transactions on ultrasonics, ferroelectrics, and frequency control, vol. 53, no. 12, december 2006 Correspondence
- 1662 ieee transactions on ultrasonics, ferroelectrics, and frequency control, vol. 53, no. 9, september 2006 Systematic Design Approach for Capacitively
- JOURNAL OF MICROELECTROMECHANICAL SYSTEMS, VOL. 15, NO. 1, FEBRUARY 2006 141 Third-Order Intermodulation in
- IEEE ELECTRON DEVICE LETTERS, VOL. 26, NO. 5, MAY 2005 289 Intermodulation in Capacitively Coupled
- THIS IS A PRE-PRINT OF PAPER PUBLISHED IN SENSORS AND ACTUATORS A: PHYSICAL, VOL. 120(1), PP. 64-70 , 29 APRIL 2005. 1 Nonlinear Mechanical Effects in Silicon
- JOURNAL OF MICROELECTROMECHANICAL SYSTEMS, VOL. 12, NO. 4, AUGUST 2003 425 Thermokinetic Actuation for Batch Assembly of
- The 15th IEEE International Conference on Micro Electro Mechanical Systems Las Vegas, Nevada, Jan. 20-24, 2002, pp. 196-199
- Silicon as an anisotropic mechanical material -a tutorial Ville Kaajakari
- MEMS Tutorial: Pull-in voltage in electrostatic microactuators
- MEMS Tutorial: Nonlinearity in Micromechanical Resonators
- STABILITY OF WAFER LEVEL VACUUM ENCAPSULATED SINGLE-CRYSTAL SILICON RESONATORS
- MEMS Tutorial: Mechanical noise in microelectromechanical systems
- JOURNAL OF MICROELECTROMECHANICAL SYSTEMS, VOL. 13, NO. 5, OCTOBER 2004 715 Nonlinear Limits for Single-Crystal
