- INSTITUTE OF PHYSICS PUBLISHING JOURNAL OF MICROMECHANICS AND MICROENGINEERING J. Micromech. Microeng. 12 (2002) 18 PII: S0960-1317(02)32470-7
- Micromachined Inertial Sensors Recent Developments at BSAC
- Chapter 7: The Digital Accelerometer Page 83 THE DIGITAL ACCELEROMETER
- Closed Loop Micromachined Inertial Sensors with Higher Order -Modulators M. Kraft, W. Redman-White, M. E. Mokhtari*
- Submitted to Symposium on VLSI Circuits, June 2000 A Monolithic Surface Micromachined Z-Axis Gyroscope with Digital Output
- INSTITUTE OF PHYSICS PUBLISHING JOURNAL OF MICROMECHANICS AND MICROENGINEERING J. Micromech. Microeng. 14 (2004) S114S122 PII: S0960-1317(04)77980-2
- Pyramidal micromirrors for microsystems and atom chips M. Trupke,a
- INSTITUTE OF PHYSICS PUBLISHING JOURNAL OF MICROMECHANICS AND MICROENGINEERING J. Micromech. Microeng. 15 (2005) 893902 doi:10.1088/0960-1317/15/5/001
- INSTITUTE OF PHYSICS PUBLISHING JOURNAL OF MICROMECHANICS AND MICROENGINEERING J. Micromech. Microeng. 13 (2003) S11S16 PII: S0960-1317(03)59936-3
- Modelling of an Accelerometer Based on a Levitated Proof Mass
- System Level Simulation of an Electrostatically Levitated Disk Michael Kraft and Alan Evans *
- [published in the Technical Digest of the Solid-State Sensor and Actuator Workshop, Hilton Head Island, SC, June 2000, p.296-9.] SENSE FINGER DYNAMICS IN A FORCE-FEEDBACK GYROSCOPE
- A NOVEL MICROMACHINED ACCELEROMETER CAPACITIVE INTERFACE
- Chapter 1: Introduction Page 1 Fig. 1.1: Principle of a transducer.
- Body of interest y Chapter 2: Principle of Operation of an Accelerometer Page 7
- Chapter 3: Micromachined Accelerometers: a Brief Overview Page 12 MICROMACHINED ACCELEROMETERS: A BRIEF
- Seismic mass Top electrode
- Chapter 5: The Open Loop Accelerometer Page 24 Fig. 5.1: Charge amplifier circuit for measuring the imbalance in
- 2"(W/L)W 3 Chapter 5: The Open Loop Accelerometer Page 36
- Chapter 7: The Digital Accelerometer Page 109 Fig. 7.21: Principle of the pick-off circuit used for the
- Michael Kraft MEMS Research at ECS with contributions from
- INSTITUTE OF PHYSICS PUBLISHING JOURNAL OF MICROMECHANICS AND MICROENGINEERING J. Micromech. Microeng. 16 (2006) S54S60 doi:10.1088/0960-1317/16/6/S09
- Chapter 9: Conclusions Page 140 CONCLUSIONS
- 486 IEEE TRANSACTIONS ON ELECTRON DEVICES, VOL. 51, NO. 3, MARCH 2004 Ultralow Silicon Substrate Noise Crosstalk Using
- Alan Evans -Michael Kraft Steve Beeby MEMS Research at ECS Department Southampton University
- Top electrode Seismic mass
- INSTITUTE OF PHYSICS PUBLISHING JOURNAL OF MICROMECHANICS AND MICROENGINEERING J. Micromech. Microeng. 15 (2005) S22S29 doi:10.1088/0960-1317/15/7/004
- OutputInput Analogue Discrete
- INSTITUTE OF PHYSICS PUBLISHING JOURNAL OF MICROMECHANICS AND MICROENGINEERING J. Micromech. Microeng. 11 (2001) 423427 www.iop.org/Journals/jm PII: S0960-1317(01)19038-8
- References Page 146 [1] Agrawal, B.P. and Shenoi, K. Design methodology for E) Modulators. IEEE on
- Chapter 8: Outlook and Further Work Page 133 OUTLOOK AND FURTHER WORK
- Sensors and Actuators A 115 (2004) 600607 Microfabrication of gold wires for atom guides
- INSTITUTE OF PHYSICS PUBLISHING JOURNAL OF MICROMECHANICS AND MICROENGINEERING J. Micromech. Microeng. 14 (2004) S82S85 PII: S0960-1317(04)78036-5
- Analysis and Design of a Capacitive Accelerometer Based on a Electrostatically Levitated Micro-disk
- Seismic mass Top electrode
- Microfabricated high-finesse optical cavity with open access and small volume
- Developments in Digital Transducers for Vehicle Control and Telemetric Instrumentation
- Chapter 6: The Analogue, Closed Loop Accelerometer Page 54 THE ANALOGUE, CLOSED LOOP ACCELEROMETER
- Modelling and Design of an Electrostatically Levitated Disk for Inertial Sensing Applications
- System Level Simulation of a Digital Accelerometer M. Kraft*, C. P. Lewis**
- Chapter 6: The Analogue, Closed Loop Accelerometer Page 65 6.3 Modelling and Simulation
- Micromachined Inertial Sensors State of the Art and a Look into the Future
