- An Electronic Prosthesis Mimicking the Dynamic Vestibular Andrei M. Shkela
- Copy provided by USPTO from the PIRS Image Database on 08-13-2002 Copy provided by USPTO from the PIRS Image Database on 08-13-2002
- 0-7803-7454-1/02/$17.00 2002 IEEE 25.4: Active Structural Error Suppression in
- 1324 JOURNAL OF MICROELECTROMECHANICAL SYSTEMS, VOL. 16, NO. 6, DECEMBER 2007 A Novel Capacitive Detection Scheme
- Micromachined Gyroscope Design Allowing for Both Robust Wide-Bandwidth and
- Identification of anisoelasticity for electrostatic " trimming " of rate integrating gyroscopes
- System Design and Experimental Evaluation of a MEMS-based Semicircular Canal Prosthesis
- NEW ARCHITECTURAL DESIGN OF A TEMPERATURE ROBUST MEMS GYROSCOPE WITH IMPROVED GAIN-BANDWIDTH CHARACTERISTICS
- Fax +41 61 306 12 34 E-Mail karger@karger.ch
- THE EFFECT OF HIGH ORDER NON-LINEARITIES ON SUB-HARMONIC EXCITATION WITH PARALLEL PLATE CAPACITIVE ACTUATORS
- IEEE SENSORS JOURNAL, VOL. 7, NO. 12, DECEMBER 2007 1653 Design and Demonstration of a Bulk Micromachined
- 1044 JOURNAL OF MICROELECTROMECHANICAL SYSTEMS, VOL. 16, NO. 5, OCTOBER 2007 Resonant Pull-In Condition in Parallel-Plate
- Multi-Degree of Freedom Tuning Fork Gyroscope Demonstrating Shock Rejection
- INSTITUTE OF PHYSICS PUBLISHING JOURNAL OF MICROMECHANICS AND MICROENGINEERING J. Micromech. Microeng. 15 (2005) 10921101 doi:10.1088/0960-1317/15/5/028
- 0-7803-7454-1/02/$17.00 2002 IEEE Feasibility Study on a Prototype of Vestibular Implant
- International Conference and Exhibition on Device Packaging, Scottsdale, AZ, USA, March 8 11, 2010 Micro IMU Utilizing Folded Cube Approach
- Passive Network of Fabry-Perot based Sensors with Wavelength Multiplexing Capabilities
- 1082 JOURNAL OF MICROELECTROMECHANICAL SYSTEMS, VOL. 17, NO. 5, OCTOBER 2008 Snap-Action Bistable Micromechanisms
- Experimental Evaluation of a Control System for an Absolute Angle Measuring Micromachined
- Comparative analysis of distributed mass micromachined gyroscopes fabricated in SCS-SOI and EFAB
- Please cite this article in press as: A.A. Trusov, et al., Micromachined rate gyroscope architecture with ultra-high quality factor and improved mode ordering, Sens. Actuators A: Phys. (2010), doi:10.1016/j.sna.2010.01.007
- Study of Substrate Energy Dissipation Mechanism in in-Phase and Anti-Phase
- A Standalone Programmable Signal Processing Unit for Versatile Characterization of MEMS Gyroscopes
- Smart Structures and Systems, Vol. 1, No. 1 (2005) 63-82 63 Conceptual design and preliminary characterization of
- Post-Release Capacitance Enhancement in Micromachined Devices
- SPHERICAL RUBIDIUM VAPOR CELLS FABRICATED BY MICRO GLASS BLOWING E. Jesper Eklund1
- IEEE SENSORS JOURNAL, VOL. 9, NO. 12, DECEMBER 2009 1895 Environmentally Robust MEMS Vibratory
- Proof mass 1Proof mass 1 Drive, xDrive, x
- PREDICTIVE THERMAL MODEL FOR INDIRECT TEMPERATURE MEASUREMENT INSIDE ATOMIC CELL OF NUCLEAR MAGNETIC RESONANCE GYROSCOPE
- Available online at www.sciencedirect.com Sensors and Actuators A 143 (2008) 175180
- IOP PUBLISHING JOURNAL OF MICROMECHANICS AND MICROENGINEERING J. Micromech. Microeng. 17 (2007) 15831592 doi:10.1088/0960-1317/17/8/022
- Materials Science and Engineering A 458 (2007) 101107 Fluxless silicon-to-alumina bonding using electroplated
- IOP PUBLISHING JOURNAL OF MICROMECHANICS AND MICROENGINEERING J. Micromech. Microeng. 17 (2007) 730736 doi:10.1088/0960-1317/17/4/009
- 8th. World Congress on Computational Mechanics (WCCM8) 5th European Congress on Computational Methods in Applied Sciences and Engineering (ECCOMAS 2008)
- ROBUST OPTICAL DESIGN OF ANGLED MULTILAYER DIELECTRIC MIRRORS OPTIMIZED FOR RUBIDIUM VAPOR CELL RETURN REFLECTION
- A NOVEL CAPACITIVE DETECTION SCHEME WITH INHERENT SELF-CALIBRATION
- Performance Trade-offs of an Interferometric Micro-g Resolution Accelerometer
- Inherently Robust Micromachined Gyroscopes with 2-DOF Sense-Mode Oscillator
- Single-Mask SOI Fabrication Process for Linear and Angular Piezoresistive Accelerometers
- On Electrostatic Actuation Beyond Snapping A. Fargas-Marques
- Effect of Levitation Forces on the Performance of Surface Micromachined MEMS Gyroscopes
- 0-7803-7454-1/02/$17.00 2002 IEEE Increased Parametric Space
- 15 15.5 16 16.5 17 17.5 18 18.5 19 19.5 20 Single mass 2-DOF System with Mode Mismatch
- Proceedings of the AmericanControlConference Arlington, VA June 25-27, 2001
- Proceedings of ASME 2007 International Design Engineering Technical Conferences & Computers and Information in Engineering Conference
- Two Types of Micromachined Vibratory Gyroscopes Andrei M. Shkel
- VERSATILE VACUUM PACKAGING FOR EXPERIMENTAL STUDY OF RESONANT MEMS
- ON DEVELOPMENT OF TOTALLY IMPLANTABLE VESTIBULAR PROSTHESIS
- Sensor Management for Local Obstacle Detection in Mobile Robots Juan C. Alvarez
- IOP PUBLISHING JOURNAL OF MICROMECHANICS AND MICROENGINEERING J. Micromech. Microeng. 18 (2008) 095016 (10pp) doi:10.1088/0960-1317/18/9/095016
- RUBIDIUM VAPOR CELL WITH INTEGRATED NONMETALLIC MULTILAYER REFLECTORS
- 1-4244-0842-3/07/$20.002007 IEEE TRANSDUCERS&EUROSENSORS'07
- INSTITUTE OF PHYSICS PUBLISHING JOURNAL OF MICROMECHANICS AND MICROENGINEERING J. Micromech. Microeng. 13 (2003) 634645 PII: S0960-1317(03)60609-1
- 380 JOURNAL OF MICROELECTROMECHANICAL SYSTEMS, VOL. 15, NO. 2, APRIL 2006 Inherently Robust Micromachined Gyroscopes
- INSTITUTE OF PHYSICS PUBLISHING JOURNAL OF MICROMECHANICS AND MICROENGINEERING J. Micromech. Microeng. 15 (2005) 17701776 doi:10.1088/0960-1317/15/9/020
- Type I and Type II Micromachined Vibratory Gyroscopes
- 520 JOURNAL OF MICROELECTROMECHANICAL SYSTEMS, VOL. 14, NO. 3, JUNE 2005 An Approach for Increasing Drive-Mode Bandwidth
- Designing Micromachined Accelerometers with Interferometric Detection
- An Electronic Prosthesis Mimicking the Dynamic Vestibular Function
- 3-D MICROMACHINED SPHERICAL SHELL RESONATORS WITH INTEGRATED ELECTROMAGNETIC AND ELECTROSTATIC TRANSDUCERS
- TUNABLE MICRO-INTERFEROMETERS FOR TELECOMMUNICATION AND
- Dynamic Analysis Of A Snap-Action Micromechanism Jasmina Casals-Terre
- 232 JOURNAL OF MICROELECTROMECHANICAL SYSTEMS, VOL. 16, NO. 2, APRIL 2007 Glass Blowing on a Wafer Level
- DESIGN TRADE-OFFS OF MICROMACHINED GYROSCOPE CONCEPT ALLOWING INTERCHANGEABLE OPERATION IN BOTH ROBUST AND PRECISION MODES
- IOP PUBLISHING JOURNAL OF MICROMECHANICS AND MICROENGINEERING J. Micromech. Microeng. 18 (2008) 055031 (10pp) doi:10.1088/0960-1317/18/5/055031
- 1672 IEEE SENSORS JOURNAL, VOL. 8, NO. 10, OCTOBER 2008 Effects of Operational Frequency Scaling in
- 1-4244-0842-3/07/$20.002007 IEEE TRANSDUCERS&EUROSENSORS'07
- Sensors and Actuators A 155 (2009) 1622 Contents lists available at ScienceDirect
- Non-Resonant Surface-Micromachined Z-Axis Gyroscopes Utilizing Torsional Out-of-Plane Detection
- Snap-Action Bistable Micromechanism Actuated By Nonlinear Resonance
