Chen, Francis F. - Electrical Engineering Department, University of California at Los Angeles

• Electrical Engineering Department Los Angeles, California 90095-1594
• INSTITUTE OF PHYSICS PUBLISHING PLASMA SOURCES SCIENCE AND TECHNOLOGY Plasma Sources Sci. Technol. 10 (2001) 226235 www.iop.org/Journals/ps PII: S0963-0252(01)22648-6
• Physical mechanism of current-free double layers Francis F. Chen
• Electrical Engineering Department Los Angeles, California 90095-1594
• Electrical Engineering Department Los Angeles, California 90095-1594
• VOLUME 86, NUMBER 24 P H Y S I C A L R E V I E W L E T T E R S 11 JUNE 2001 Nonlocal Power Deposition in Inductively Coupled Plasmas
• Evaluation of Langmuir probe ion density measurement in weakly ionized discharges
• Plane-polarized helicon waves Francis F. Chen
• Electrical Engineering Department Los Angeles, California 90095-1594
• Nonlinear Diffusion in Magnetized Discharges Francis F. Chen
• Electrical Engineering Department Los Angeles, California 90095-1594
• Design of a helicon plasma injector using the HELIC code
• Helicon wave excitation with rotating antenna fields
• Comment on "Comment on `Magnetic field effects on gas discharge plasmas' " Phys. Plasmas 14, 024701 ,,2007...
• Electrical Engineering Department Los Angeles, California 90095-1594
• Electrical Engineering Department Los Angeles, California 90095-1594
• The low-field density peak in helicon discharges Francis F. Chena)
• Collisional, magnetic, and nonlinear skin effect in radio-frequency plasmas Francis F. Chen
• Lecture Notes on PRINCIPLES OF
• Electrical Engineering Department Los Angeles, California 90095-1594
• Electrical Engineering Department Los Angeles, California 90095-1594
• Downloaded 11 Oct 2005 to 164.67.194.141. Redistribution subject to AIP license or copyright, see http://pof.aip.org/pof/copyright.jsp Downloaded 11 Oct 2005 to 164.67.194.141. Redistribution subject to AIP license or copyright, see http://pof.aip.org/pof
• IEEE TRANSACTIONS ON PLASMA SCIENCE, VOL. 25, NO. 6, DECEMBER 1997 1245 Helicons--The Past Decade
• Plasma Sources Sci. Technol. 5 (1996) 4353. Printed in the UK Discharge equilibrium of a helicon
• VOLUME 82, NUMBER 13 P H Y S I C A L R E V I E W L E T T E R S 29 MARCH 1999 Upper Limit to Landau Damping in Helicon Discharges
• IOP PUBLISHING PLASMA PHYSICS AND CONTROLLED FUSION Plasma Phys. Control. Fusion 49 (2007) A81A93 doi:10.1088/0741-3335/49/5A/S07
• Plasma Sources Sci. Technol. 5 (1996) 173180. Printed in the UK Downstream physics of the helicon
• Investigation of Electromagnetic Field Penetration in ICP and Weakly-Magnetized ICP Discharges
• The floating potential of cylindrical Langmuir probes Francis F. Chena)
• PROBE DETECTION OF PHASED EEDFS IN RF DISCHARGES
• Electrical Engineering Department Los Angeles, California 90095-1594
• Submitted to Physics of Plasmas. Generalized theory of helicon waves
• Electrical Engineering Department Los Angeles, California 90095-1594
• Plasma Sources Sci. Technol. 6 (1997) 569576. Printed in the UK PII: S0963-0252(97)87747-X Two-dimensional imaging of a helicon
• Use of Langmuir probes in high density plasmas Francis F. Chen* and John D. Evans**
• Homework # 3 UCLA, Spring 2004
• Physical mechanism of current-free double layers Francis F. Chen
• 718 IEEE TRANSACTIONS ON PLASMA SCIENCE, VOL. 34, NO. 3, JUNE 2006 Nonlinear Effects and Anomalous Transport
• 2D Imaging of a Helicon Discharge David D. Blackwell Francis F. Chen
• Plasma Sources Sci. Technol. 7 (1998) 537549. Printed in the UK PII: S0963-0252(98)96984-5 Density limit in helicon discharges
• Electrical Engineering Department Los Angeles, California 90095-1594
• A floating potential method for measuring ion density Francis F. Chen, John D. Evans, and Donald Arnush
• The role of TrivelpieceGould waves in antenna coupling to helicon waves Donald Arnush
• Helicon wave excitation with helical antennas Max Light and Francis F. Chen
• IEEE TRANSACTIONS ON PLASMA SCIENCE, VOL. 36, NO. 5, OCTOBER 2008 2095 Permanent Magnet Helicon Source for Ion Propulsion
• Permanent magnet helicon source for ion propulsion Francis F. Chen
• Abstract: Helicon wave sources are known for the dense, remote plasmas they create for etching. Recently
• REVIEW ARTICLES Physics of helicon discharges*
• Electrical Engineering Department Los Angeles, California 90095-1594
• Submitted to Physics of Plasmas. HELICON WAVE EXCITATION
• Industrial applications of low-temperature plasma physics* Francis F. Chent
• Text of a review paper presented at the Annual Meeting of the APS Division of Plasma Physics, Minneapolis, MN on Nov. 11, 1994. Part A will be
• Plasma Phys. Control. Fusion 39 (1997) 15331550. Printed in the UK PII: S0741-3335(97)79833-6 dc probe detection of phased EEDFs in RF discharges
• Generalized theory of helicon waves. I. Normal modes Francis F. Chen and Donald Arnush
• Plasma Phys. Control. Fusion 39 (1997) A411A420. Printed in the UK PII: S0741-3335(97)80958-X Low-field helicon discharges
• Plasma Sources Sci. Technol. 6 (1997) 394397. Printed in the UK PII: S0963-0252(97)85045-1 Plane-polarized helicon waves
• Generalized theory of helicon waves. II. Excitation and absorption Donald Arnusha)
• Electrical Engineering Department Los Angeles, California 90095-1594
• COUPLED HELICON-CYCLOTRON MODES: THEORY AND EXPERIMENT
• Electrical Engineering Department Los Angeles, California 90095-1594
• Plasma injection with helicon sources Francis F. Chen,a)
• Langmuir probe analysis for high density plasmas Francis F. Chena)
• Electrical Engineering Department Los Angeles, California 90095-1594
• Electrical Engineering Department Los Angeles, California 90095-1594
• INSTITUTE OF PHYSICS PUBLISHING PLASMA SOURCES SCIENCE AND TECHNOLOGY Plasma Sources Sci. Technol. 10 (2001) 236249 www.iop.org/Journals/ps PII: S0963-0252(01)17082-9
• Electrical Engineering Department Los Angeles, California 90095-1594
• Electrical Engineering Department Los Angeles, California 90095-1594
• Electrical Engineering Department Los Angeles, California 90095-1594
• Electrical Engineering Department Los Angeles, California 90095-1594
• Electrical Engineering Department Los Angeles, California 90095-1594
• Electrical Engineering Department Los Angeles, California 90095-1594
• VOLUME 88, NUMBER 14 P H Y S I C A L R E V I E W L E T T E R S 8 APRIL 2002 Evidence for Trivelpiece-Gould Modes in a Helicon Discharge
• Electrical Engineering Department Los Angeles, California 90095-1594
• Electrical Engineering Department Los Angeles, California 90095-1594
• INSTITUTE OF PHYSICS PUBLISHING PLASMA SOURCES SCIENCE AND TECHNOLOGY Plasma Sources Sci. Technol. 12 (2003) 287293 PII: S0963-0252(03)62086-4
• Lecture Notes on Langmuir Probe Diagnostics
• Electrical Engineering Department Los Angeles, California 90095-1594
• Druckfreigabe/approval for printing Without corrections/
• Electrical Engineering Department Los Angeles, California 90095-1594
• INSTITUTE OF PHYSICS PUBLISHING PLASMA SOURCES SCIENCE AND TECHNOLOGY Plasma Sources Sci. Technol. 15 (2006) 773782 doi:10.1088/0963-0252/15/4/022
• Ion orbits in plasma etching of semiconductors Tsitsi G. Madziwa-Nussinova)
• Manuscript number is: TPS1702: Revision 1 Abstract--Self-consistent computations of electric fields and
• Diffusion of an annular plasma in positron acceleration Francis F. Chena
• Electrical Engineering Department Los Angeles, California 90095-1594
• Langmuir probes in RF plasma: surprising validity of OML theory Francis F. Chen
• Permanent-magnet helicon sources and arrays: A new type of rf plasmaa... Francis F. Chenb
• Permanent-magnet helicon sources and arrays: a new type of rf plasma Francis F. Chena)
• Electrical Engineering Department Los Angeles, California 90095-1594
• CHEMICAL ENGINEERING DEPARTMENT ChE 234, Spring, 2004
• Homework #2 UCLA, Spring 2004
• Homework # 4 UCLA, Spring 2004
• IOP PUBLISHING PLASMA SOURCES SCIENCE AND TECHNOLOGY Plasma Sources Sci. Technol. 18 (2009) 035012 (13pp) doi:10.1088/0963-0252/18/3/035012
• Time-resolved measurements of the EEDF in a helicon plasma David D. Blackwell and Francis F. Chen
• 1388 IEEE TRANSACTIONS ON PLASMA SCIENCE, VOL. 35, NO. 5, OCTOBER 2007 Ion-Shading Effects During Metal Etch
• Invited paper, Int'l Conf. on Plasma Physics, Nagoya, Japan, Sept. 9-13, 1996. To be published in Plasma Physics and Controlled Fusion.
• Plasma Physics PART Al: INTRODUCTION TO PLASMA SCIENCE
• IOP PUBLISHING PLASMA SOURCES SCIENCE AND TECHNOLOGY Plasma Sources Sci. Technol. 16 (2007) 593596 doi:10.1088/0963-0252/16/3/019
• Submitted to Physics of Plasmas AXIAL PROPAGATION OF
• Performance of a multi-tube, large-area Each source, shown in Fig. 2, consisted of a helicon source 2" diam tube, a helical antenna of azimuthal
• INSTITUTE OF PHYSICS PUBLISHING PLASMA SOURCES SCIENCE AND TECHNOLOGY Plasma Sources Sci. Technol. 11 (2002) 273278 PII: S0963-0252(02)35617-2
• Ion orbits in plasma etching of semiconductors Tsitsi G. Madziwa-Nussinov,a
• The low-field density peak in helicon discharges Francis F. Chen
• Plasma Phys. Control. Fusion 38 (1996) 129153. Printed in the UK Helicon waves in a flaring magnetic field
• Low frequency electrostatic instability in a helicon plasma Max Lighta)
• CHEMICAL ENGINEERING DEPARTMENT ChE 234, Spring, 2002
• Electrical Engineering Department Los Angeles, California 90095-1594
• CHEMICAL ENGINEERING DEPARTMENT ChE 234, Spring, 2004
• Plasma Sources Sci. Technol. 7 (1998) 6174. Printed in the UK PII: S0963-0252(98)90514-X Helicon wave excitation with rotating
• Plasma Sources Sci. Technol. 7 (1998) 458461. Printed in the UK PII: S0963-0252(98)96034-0 Nonlinear diffusion in magnetized
• AN INDISPENSABLE TRUTH How fusion power can save the planet
• Axial propagation of helicon waves Max Light, Isaac D. Sudit, Francis F. Chen,a) and Donald Arnush
• A floating potential method for measuring ion density Francis F. Chen, John D. Evans, and Donald Arnush