Hopwood, Jeffrey A.- Department of Electrical Engineering and Computer Science, Tufts University

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Hopwood, Jeffrey A.- Department of Electrical Engineering and Computer Science, Tufts University

Miniaturization of Inductively Coupled Plasma Sources Y. Yin, J. Messier, and J. Hopwood
Ionized physical vapor deposition of integrated circuit interconnects* J. Hopwood,a)
A Microfabricated Inductively-Coupled Plasma Generator Department of Electrical and Computer Engineering,
Jeffrey A. Hopwood Electrical and Computer Engineering Dept.
(12) INTERNATIONAL APPLICATION PUBLISHED UNDER THE PATENT COOPERATION TREATY (PCT) (19) World Intellectual Property Organization