
- ieee transactions on ultrasonics, ferroelectrics, and frequency control, vol. 54, no. 2, february 2007 251 MEMS Technology for Timing and Frequency
- Kun Wang, Frank D. Bannon III, John R. Clark, and Clark T.-C. Nguyen
- C. T.-C. Nguyen, "MEMS for frequency control and timing (invited)," Proceedings, Joint IEEE Int. Frequency Control/Precision Time & Time In-terval Symposium, Vancouver , Canada , Aug. 29-31, 2005, pp. 1-11.
- Design of Low Actuation Voltage RF MEMS Switch Sergio P. Pacheco1
- JOURNAL OF MICROELECTROMECHANICAL SYSTEMS, VOL. 15, NO. 6, DECEMBER 2006 1419 Mechanically Corner-Coupled Square Microresonator
- PHASE NOISE AMPLITUDE DEPENDENCE IN SELF-LIMITING WINE-GLASS DISK OSCILLATORS
- Higher-Mode Free-Free Beam Micromechanical Mustafa U. Demirci and Clark T.-C. Nguyen
- 440 IEEE JOURNAL OF SOLID-STATE CIRCUITS, VOL. 34, NO. 4, APRIL 1999 An Integrated CMOS Micromechanical
- 1486 IEEE TRANSACTIONS ON MICROWAVE THEORY AND TECHNIQUES, VOL. 47, NO. 8, AUGUST 1999 Frequency-Selective MEMS for Miniaturized
- A modified Pierce circuit topology has been used to first demonstrate a 9.75 MHz mechanical resonator ref-
- Vibrating RF MEMS for Low Power Communications Clark T.-C. Nguyen
- S.-S. Li, Y.-W. Lin, Z. Ren, and C. T.-C. Nguyen, "Self-switching vibrating micromechanical filter bank," Proceedings, Joint IEEE Int. Frequency Control/Precision Time & Time Interval Symposium, Vancouver, Canada, Aug. 29-31, 2005, pp. 135-141.
- S.-S. Li, Y.-W. Lin, Y. Xie, Z. Ren, and C. T.-C. Nguyen, "Charge-biased vibrating micromechanical resonators," Proceedings, IEEE Int. Ultra-sonics Symposium, Rotterdam, The Netherlands, Sept. 18-21, 2005, pp. 1596-1599.
- C. T.-C. Nguyen, "MEMS technologies and devices for single-chip RF front-ends (invited)," 2005 IMAPS/ACerS Int. Conf. on Ceramic Interconnect and Ceramic Microsystems Technologies (CICMT), Tech. Dig., Denver, Colorado, April 25-26, 2006.
- Laterally vibrating free-free beam micromechanical resonators have been demonstrated that utilize second-
- S. Lee and C. T.-C. Nguyen, "Mechanically-coupled micromechanical arrays for improved phase noise," Proceedings, IEEE Int. Ultrasonics, Ferroelectrics, and Frequency Control 50th Anniv. Joint Conf., Montreal, Canada, Aug. 24-27, 2004, pp. 280-286.
- 512 IEEE JOURNAL OF SOLID-STATE CIRCUITS, VOL. 35, NO. 4, APRIL 2000 High-Q HF Microelectromechanical Filters
- Frequency measurements are utilized to show that the series motional resistance Rx of a capacitive-comb
- CMOS Micromechanical Resonator Oscillator Clark T.-C. Nguyen and Roger T. Howe
- High-Order Micromechanical Electronic Filters Kun Wang and Clark T.-C. Nguyen
- M. A. Abdelmoneum, M. U. Demirci, Y.-W. Lin, and C. T.-C. Nguyen, "Location-dependent tuning of vibrating micromechanical resonators via laser trim-ming," Proceedings, IEEE Int. Ultrasonics, Ferroelectrics, and Frequency Control 50th Anniv. Joint Conf., M
- Anneal-Activated, Tunable, 68MHz Micromechanical Filters Ark-Chew Wong, John R. Clark and Clark T.-C. Nguyen
- CVD POLYCRYSTALLINE DIAMOND HIGH-Q MICROMECHANICAL RESONATORS Jing Wang, James E. Butler*, D. S. Y. Hsu*, and Clark T.-C. Nguyen
- J. Wang, Y. Xie, and C. T.-C. Nguyen, "Frequency tolerance of RF micromechanical disk resonators in nanocrystalline diamond and polysilicon structural materials," Technical Digest, IEEE Int. Electron Devices Mtg., Washington, DC, Dec. 5-7, 2005, pp. 291-2
- Transceiver Front-End Architectures Using Vibrating Micromechanical Signal Processors
- Micromachined Devices for Wireless Communications Clark T.-C. Nguyen, Member, IEEE, Linda P. B. Katehi, Fellow, IEEE, and Gabriel M. Rebeiz, Fellow, IEEE
- High-Q VHF Micromechanical Contour-Mode Disk Resonators John R. Clark, Wan-Thai Hsu, and Clark T.-C. Nguyen
- A Bonded-Micro-Platform Technology for Modular Merging of RF MEMS and Transistor Circuits
- W.-L. Huang, Z. Ren, Y.-W. Lin, H.-Y. Chen, J. Lahann, and C. T.-C. Nguyen, "Fully monolithic CMOS nickel micromechanical resonator oscillator," Tech. Digest, 21st
- C. T.-C. Nguyen, "Vibrating RF MEMS overview: applications to wireless communications," Proceedings of SPIE: Micromachining and Microfabrication Process Technology, vol. 5715, Photonics West: MOEMS-MEMS 2005, San Jose, California, Jan. 22-27,
- MICROMECHANICAL "HOLLOW-DISK" RING RESONATORS Sheng-Shian Li, Yu-Wei Lin, Yuan Xie, Zeying Ren, and Clark T.-C. Nguyen
- W.-L. Huang, S.-S. Li, Z. Ren, and C. T.-C. Nguyen, "UHF nickel micromechanical spoke-supported ring resonators," Dig. of Tech. Papers, the 14th
- C. T.-C. Nguyen, "RF MEMS in wireless architectures (invited)," Proceedings, the 42nd Design Automation Conference, Anaheim, Cali-
- C. T.-C. Nguyen, "Integrated micromechanical circuits fueled by vibrating RF MEMS technology," Proceedings, IEEE Int. Ultrasonics Sympo-sium, Oct. 2-6, 2006, pp. 953-962.
- 1999 IEEE International Solid-State Circuits Conference 0-7803-5129-0/99 IEEE 1999 MP 4.7 Tunable, Switchable, High-Q VHF
- Micromechanical Circuits for Communications Clark T.-C. Nguyen
- Micromechanical Circuits for Wireless Communications Clark T.-C. Nguyen
- Micromechanical filters for miniaturized low-power communications Clark T.-C. Nguyen
- SELF-ALIGNED 1.14-GHZ VIBRATING RADIAL-MODE DISK RESONATORS Jing Wang, Zeying Ren, and Clark T.-C. Nguyen
- Y. Lin, J. Wang, S. Pietrangelo, Z. Ren, and C. T.-C. Nguyen, "Effect of electrode configuration on the frequency and quality factor repeatability of RF micromechanical disk resonators," Dig. of Tech. Papers, the 14th
- Clear differences in the phase noise performance of a 10 MHz MEMS-based micromechanical resonator oscillator
- An IC-compatible, high frequency (HF), lateral microme-chanical resonator supported by a mechanical structure
- A tiltable microplatform for adaptive artificial vision applica-tions has been demonstrated that utilizes special bent-beam electro-
- IEEE JOURNAL OF SOLID-STATE CIRCUITS, VOL. 39, NO. 12, DECEMBER 2004 2477 Series-Resonant VHF Micromechanical Resonator
- STEMLESS WINE-GLASS-MODE DISK MICROMECHANICAL RESONATORS Mohamed A. Abdelmoneum, Jing Wang, Mustafa U. Demirci, and Clark T.-C. Nguyen
- Y.-W. Lin, S.-S. Li, Z. Ren, and C. T.-C. Nguyen, "Vibrating micromechanical resonators with solid dielectric capacitive-transducer `gaps'," Proceedings, Joint IEEE Int. Frequency Control/Precision Time & Time Interval Symposium, Vancouver, Canada, Aug. 2
- A 10-MHz series resonant micromechanical resonator oscil-lator has been demonstrated using a custom-designed, single-
- S.-S. Li, Y.-W. Lin, Y. Xie, Z. Ren, and C. T.-C. Nguyen, "Small percent bandwidth design of a 431-MHz notch-coupled micromechanical hol-low-disk ring mixer-filter," Proceedings, IEEE Int. Ultrasonics Symposium, Sept. 18-21, 2005, 1295-1298.
- A batch-compatible, post-fabrication annealing technique based upon filament-like heating of microstructures is demon-
- Q-Enhancement of Microelectromechanical Filters Via Low-Velocity Spring Coupling
- THIRD-ORDER INTERMODULATION DISTORTION IN CAPACITIVELY-DRIVEN CC-BEAM MICROMECHANICAL RESONATORS
- M. A. Abdelmoneum, M. U. Demirci, S.-S. Li, and C. T.-C. Nguyen, "Post-fabrication laser trimming of micromechanical filters," Technical Digest, IEEE Int. Electron Devices Mtg., San Francisco, California, Dec. 13-15, 2004, pp. 39-42.
- M. U. Demirci and C. T.-C. Nguyen, "Single-resonator fourth-order micromechanical disk filters," Proceedings, 18th Int. IEEE Micro Electro Mechanical Systems Conf., Miami, Florida, Jan. 30 -Feb. 3, 2005, pp. 207-210.
- 1298 JOURNAL OF MICROELECTROMECHANICAL SYSTEMS, VOL. 14, NO. 6, DECEMBER 2005 High-Q UHF Micromechanical Radial-Contour
- 1.51-GHZ NANOCRYSTALLINE DIAMOND MICROMECHANICAL DISK RESONATOR WITH MATERIAL-MISMATCHED ISOLATING SUPPORT
- 2004 IEEE International Solid-State Circuits Conference 0-7803-8267-6/04 2004 IEEE ISSCC 2004 / SESSION 17 / MEMS AND SENSORS / 17.7
- MECHANICALLY CORNER-COUPLED SQUARE MICRORESONATOR ARRAY FOR REDUCED SERIES MOTIONAL RESISTANCE
- 84 2005 IEEE International Solid-State Circuits Conference 0-7803-8904-2/05/$20.00 2005 IEEE. ISSCC 2005 / SESSION 4 / TD: MIXED-DOMAIN SYSTEMS / 4.5
- Vibrating RF MEMS for Next Generation Wireless Applications Clark T.-C. Nguyen
- Vibrating polysilicon micromechanical ring resonators, uti-lizing a unique extensional wine-glass mode shape to achieve
- MEMS Technologies for Communications Clark T.-C. Nguyen*
- RF MEMS for Low-Power Communications Clark T.-C. Nguyen
- VIBRATING RF MEMS FOR LOW POWER WIRELESS COMMUNICATIONS
- Micromechanical Circuits for Communication Transceivers Clark T.-C. Nguyen
- C. T.-C. Nguyen, "Transceiver front-end architectures using high-Q micromechanical resonators (invited)," Pro-ceedings, IEEE European MIDAS Workshop, University of Surrey, United Kingdom, July 17-18, 2000.
- Microelectromechanical Components for Miniaturized Low-Power Communications
- Micromachining technologies for miniaturized communication devices Clark T.-C. Nguyen
- Communications Applications of Microelectromechanical Systems Clark T.-C. Nguyen
- Frequency-Selective MEMS for Miniaturized Communication Devices
- Microelectromechanical Devices for Wireless Communications Clark T.-C. Nguyen
- High-Q Micromechanical Oscillators and Filters for Communications Clark T.-C. Nguyen
- Micromechanical Resonators for Oscillators and Filters Clark T.-C. Nguyen
- ieee transactions on ultrasonics, ferroelectrics, and frequency control, vol. 51, no. 12, december 2004 1607 1.156-GHz Self-Aligned Vibrating
- JOURNAL OF MICROELECTROMECHANICAL SYSTEMS, VOL. 9, NO. 3, SEPTEMBER 2000 347 VHF FreeFree Beam High-Q
- 534 JOURNAL OF MICROELECTROMECHANICAL SYSTEMS, VOL. 8, NO. 4, DECEMBER 1999 High-Order Medium Frequency
- JOURNAL OF MICROELECTROMECHANICAL SYSTEMS, VOL. 8, NO. 3, SEPTEMBER 1999 221 A Merged Process for Thick Single-Crystal
- High Frequency Microelectromechanical IF Filters Frank D. Bannon, III, John R. Clark, and Clark T.-C. Nguyen
- High frequency, fourth-order, micromechanical bandpass fil-ters, with tunable frequency and bandwidth, and filter Q's in the
- Micromechanical Mixer+Filters Ark-Chew Wong, Hao Ding, and Clark T.-C. Nguyen
- Micromechanical Electrostatic K-Band Switches Student Paper
- VHF Free-Free Beam High-Q Micromechanical Resonators Kun Wang, Yinglei Yu, Ark-Chew Wong, and Clark T.-C. Nguyen
- A technique in which a micromechanical resonator is operated at large amplitudes while in situ localized
- A High-Q Tunable Micromechanical Capacitor With Movable Dielectric for RF Applications
- A high-resolution resonant temperature sensor based on resonance frequency shifts caused by thermally-
- An electromechanical mixing technique has been demonstrated for accurately measuring the performance
- A SUB-MICRON CAPACITIVE GAP PROCESS FOR MULTIPLE-METAL-ELECTRODE LATERAL MICROMECHANICAL RESONATORS
- Polysilicon mechanical resonators utilizing a novel tem-perature-dependent electrical stiffness design technique to com-
- Jing Wang, Zeying Ren, and C. T.-C. Nguyen, "1.14-GHz Self-Aligned Vibrating Micromechanical Disk Resonator" for consideration by MTT-IMS'03
- UHF High-Order Radial-Contour-Mode Disk Resonators John R. Clark, Mohamed A. Abdelmoneum, and Clark T.-C. Nguyen
- BRIDGED MICROMECHANICAL FILTERS Sheng-Shian Li, Mustafa U. Demirci, Yu-Wei Lin, Zeying Ren, and Clark T.-C. Nguyen
- Y.-W. Lin, S.-S. Li, Z. Ren, and C. T.-C. Nguyen, "Low phase noise array-composite micromechanical wine-glass disk oscillator," Technical Digest, IEEE Int. Electron Devices Mtg., Washington, DC, Dec. 5-7, 2005, pp. 287-290.
- Y.-W. Lin, S.-S. Li, Z. Ren, and C. T.-C. Nguyen, "Third-order intermodulation distortion in capacitively-driven VHF micromechanical resona-tors," Proceedings, IEEE Int. Ultrasonics Symposium, Sept. 18-21, 2005, pp. 1592-1595.
- Mustafa U. Demirci and Clark T.-C. Nguyen, "A Low Impedance VHF Micromechanical Filter Using Coupled-Array Composite Resonators," Dig. Of Tech. papers, the 13th
- Y. Xie, S.-S. Li, Y.-W. Lin, Z. Ren, and C. T.-C. Nguyen, "Spurious mode suppression in UHF micromechanical extensional wine-glass ring resonators," Proceedings, 18th Int. IEEE Micro Electro Mechanical Systems Conf., Miami, Florida, Jan. 30 -Feb. 3, 2005,
- S.-S. Li, Y.-W. Lin, Z. Ren, and C. T.-C. Nguyen, "Disk-array design for suppression of unwanted modes in micromechanical composite-array filters," Tech. Digest, 19th
- W.-L. Huang, Z. Ren, and C. T.-C. Nguyen, "Nickel vibrating micromechanical disk resonator with solid dielectric capacitive-transducer gap," Proceedings, 2006 IEEE Int. Frequency Control Symp., Miami, Florida, June 5-7, 2006, pp. 839-847.
- C. T.-C. Nguyen, "Integrated micromechanical circuits for RF front ends," Proceedings of the 36th European Solid-State Device Research Confer-
- C. T.-C. Nguyen, "Towards LSI vibrating micromechanical signal processors (invited)," Proceedings of the 32nd Int. Confer-
- Y.-W. Lin, L.-W. Hung, S.-S. Li, Z. Ren, and C. T.-C. Nguyen, "Quality factor boosting via mechanically-coupled arraying," Dig. of Tech. Papers, the 14th
- L.-W. Hung, Y. Xie, Y.-W. Lin, S.-S. Li, Z. Ren, and C. T.-C. Nguyen, "UHF micromechanical compound-(2,4) mode ring resonators with olid-Gap Transducers," Proceedings, 2006 IEEE Int. Frequency Control Symp., Geneva, Switzerland, May 29-June 1, 2007, pp. 1
- S.-S. Li, Y.-W. Lin, Z. Ren, and C. T.-C. Nguyen, "A micromechanical parallel-class disk-array filter," Proceedings, 2006 IEEE Int. Frequency Control Symp., Geneva, Switzerland, May 29-June 1, 2007, pp. 1356-1361.
- C. T.-C. Nguyen, "Vibrating RF MEMS technology: fuel for an integrated micromechanical circuit revolution? (invited)" Dig. of Tech. Papers, the 13th
- 100 JOURNAL OF MICROELECTROMECHANICAL SYSTEMS, VOL. 13, NO. 1, FEBRUARY 2004 Micromechanical Mixer-Filters ("Mixlers")
- Vibrating micromechanical resonators with Q's greater than 30,000 have been demonstrated in CVD polydiamond material with
- 328 Sensors and Actuators, A21 -A23 ( 1990) 328-33 1 Electrostatic-comb Drive of Lateral Polysilicon Resonators
- RF MEMS FOR WIRELESS APPLICATIONS Clark T.-C. Nguyen
- S.-S. Li, Y.-W. Lin, Z. Ren, and C. T.-C. Nguyen, "An MSI micromechanical differential disk-array filter," Dig. of Tech. Pa-pers, the 14th