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Gleason, Karen K. - Department of Chemical Engineering, Massachusetts Institute of Technology (MIT)
Perfluorooctane Sulfonyl Fluoride as an Initiator in Hot-Filament Chemical Vapor Deposition of Fluorocarbon
the decomposition of GeH4.[11] The fragmentation of 1 via
Hot-Filament Chemical Vapor Deposition of Organosilicon Thin Films from Hexamethylcyclotrisiloxane and
Time resolved ultraviolet absorption spectroscopy of pulsed fluorocarbon plasmas