- Proceedingsof the 2003 IEEE/RSJ InU. Conferenceon Intelligent Robotsand Systems
- Teniperature measurement in rapid thermal processing using acoustic techniques
- JOURNAL OF MICROELECTROMECHANICAL SYSTEMS, VOL. 20, NO. 1, FEBRUARY 2011 95 Fabrication of Capacitive Micromachined Ultrasonic
- Point contact ultrasonic transducer of waveguiding structure for high-frequency operation
- IOP PUBLISHING JOURNAL OF MICROMECHANICS AND MICROENGINEERING J. Micromech. Microeng. 17 (2007) 9941001 doi:10.1088/0960-1317/17/5/020
- ieee transactions on ultrasonics, ferroelectrics, and frequency control, vol. 52, no. 1, january 2005 37 Coherent-Array Imaging Using Phased
- IEEE TRANSACTIONS ON ULTRASONICS, FERROELECTRICS, AND FREQUENCY CONTROL, VOL. 49, NO. 3, MARCH 2002 293 Finite Element Analysis of Underwater
- 08853010/$25.00 2009 IEEE 182 IEEE TransacTIons on UlTrasonIcs, FErroElEcTrIcs, and FrEqUEncy conTrol, vol. 56, no. 1, JanUary 2009
- MICROMACHINED CAPACITIVE TRANSDUCER ARRAYS FOR MEDICAL ULTRASOUND IMAGING
- 886 ieee transactions on ultrasonics, ferroelectrics, and frequency control, vol. 51, no. 7, july 2004 Forward-Viewing CMUT Arrays for
- 1364 ieee transactions on ultrasonics, ferroelectrics, and frequency control, vol. 46, no. 6, november 1999 Theory and Analysis of Electrode Size
- SINGLE POINT CONTACT MEASUREMENTS OF MECHANICAL RESONANCES C. P. Hsieh and B. T. Khuri-Yakub
- 528 JOURNAL OF MICROELECTROMECHANICAL SYSTEMS, VOL. 9, NO. 4, DECEMBER 2000 A Novel Parametric-Effect MEMS Amplifier
- IEEE TRANSACTIONS ON ULTRASONICS, FERROELECTRICS, AND FREQUENCY CONTROL, VOL. 38.NO. 2 , MARCH 1991 141 Image Processing for a Scanning Acoustic
- 418 ieee transactions on ultrasonics, ferroelectrics, and frequency control, vol. 54, no. 2, february 2007 Finite Element Modeling and Experimental
- 115IEEE TRANSACTIONS ON SEMICONDUCTOR MANUFACTURING, VOL 9, NO 1, FEBRUARY 1996 Temperature Measurement in Rapid Thermal
- Downloaded 28 Jul 2006 to 171.64.85.80. Redistribution subject to AIP license or copyright, see http://rsi.aip.org/rsi/copyright.jsp Downloaded 28 Jul 2006 to 171.64.85.80. Redistribution subject to AIP license or copyright, see http://rsi.aip.org/rsi/cop
- Ultrasonic monitoring of photoresist processing Susan L. Morton, F. Levent Degertekin, and B. T. Khuri-Yakub
- Photoacoustic ocular imaging Adam de la Zerda,1,2
- Micromachined droplet ejector arrays for controlled ink-jet printing and deposition
- Phased Subarray Processing for Underwater 3D Acoustic Jmaging Jeremy A. Johnson'.', Mustafa Karniiian', B. T. KhuIi-Yakub'
- ieee transactions on ultrasonics, ferroelectrics, and frequency control, vol. 52, no. 12, december 2005 2185 Finite-Element Analysis of Capacitive
- 08853010/$25.00 2009 IEEE 136 IEEE TransacTIons on UlTrasonIcs, FErroElEcTrIcs, and FrEqUEncy conTrol, vol. 56, no. 1, JanUary 2009
- TILTED SAMPLE ACOUSTIC MICROSCOPY FOR ANISOTROPY MEASUREMENT
- 2270 ieee transactions on ultrasonics, ferroelectrics, and frequency control, vol. 52, no. 12, december 2005 Dynamic Analysis of Capacitive
- IEEE TRANSACTIONS ON SEMICONDUCTOR MANUFACTURING, VOL. 17, NO. 4, NOVEMBER 2004 517 Acoustically Actuated Flextensional
- IEEE TRANSACTIONS ON MEDICAL IMAGING, VOL. 28, NO. 7, JULY 2009 1051 Minimally Redundant 2-D Array Designs for
- Effect of surface tension on the acoustic radiation pressure-induced motion of the water-air interface
- FREQUENCY SHIFT?NG IN OPTICALFIBERUSING A SAW HORN D.B.Patterson, M. J. F. Digonnet, A. C. Liu, B. T. Khuri-Yakub,and G.S. Kino
- SPIE Newsroom 10.1117/2.1200603.0183
- ELSEVIER Microelectronic Engineering 30 (1996) 535-538 MICROELECTRONIC
- 756 IEEE TRANSACTIONS ON ULTRASONICS, FERROELECTRICS, AND FREQUENCY CONTROL, VOL. 49, NO. 6, .JUNE 2002 Piezoelectrically Actuated Flextensional
- 08853010/$25.00 2009 IEEE 193IEEE TransacTIons on UlTrasonIcs, FErroElEcTrIcs, and FrEqUEncy conTrol, vol. 56, no. 1, JanUary 2009
- JOURNAL OF MICROELECTROMECHANICAL SYSTEMS, VOL. 19, NO. 6, DECEMBER 2010 1341 Encapsulation of Capacitive Micromachined
- Design, Synthesis, and Imaging of an Activatable Photoacoustic Probe
- 114 IEEE TRANSACTIONS ON BIOMEDICAL ENGINEERING, VOL. 57, NO. 1, JANUARY 2010 Capacitive Micromachined Ultrasonic Transducers
- 08853010/$25.00 2009 IEEE 2411IEEE TransacTIons on UlTrasonIcs, FErroElEcTrIcs, and FrEqUEncy conTrol, vol. 56, no. 11, novEmbEr 2009
- Experimental StudiesWith a 9F Forward-Looking Intracardiac Imaging
- Carbon nanotubes as photoacoustic molecular imaging agents in living mice
- 08853010/$25.00 2008 IEEE 2053IEEE TRANSACTIONS ON ULTRASONICS, FERROELECTRICS, AND FREQUENCY CONTROL, VOL. 55, NO. 9, SEPTEMBER 2008
- 1570 ieee transactions on ultrasonics, ferroelectrics, and frequency control, vol. 55, no. 7, july 2008 Multifunctional Catheters Combining
- 446 JOURNAL OF MICROELECTROMECHANICAL SYSTEMS, VOL. 17, NO. 2, APRIL 2008 Fabrication of Flexible Transducer Arrays With
- ieee transactions on ultrasonics, ferroelectrics, and frequency control, vol. 55, no. 4, april 2008 811 Feasibility of MR-Temperature Mapping of
- Capacitive micromachined ultrasonic transducers (CMUTs) with isolation posts
- Capacitive micromachined ultrasonic transducers for chemical detection in nitrogen
- Sensors and Actuators A 138 (2007) 221229 Integration of trench-isolated through-wafer interconnects with
- 2394 ieee transactions on ultrasonics, ferroelectrics, and frequency control, vol. 53, no. 12, december 2006 Feasibility of Noncontact Intracardiac
- 906 IEEE SENSORS JOURNAL, VOL. 6, NO. 4, AUGUST 2006 Adaptive Pulse Repetition Frequency Technique for
- 1202 ieee transactions on ultrasonics, ferroelectrics, and frequency control, vol. 53, no. 6, june 2006 3-D Ultrasound Imaging Using a
- 2242 ieee transactions on ultrasonics, ferroelectrics, and frequency control, vol. 52, no. 12, december 2005 Capacitive Micromachined Ultrasonic
- Sensors and Actuators A 123124 (2005) 379387 A new design and manufacturing process for embedded Lamb
- doi:10.1016/j.ultrasmedbio.2005.05.005 Original Contribution
- 578 ieee transactions on ultrasonics, ferroelectrics, and frequency control, vol. 52, no. 4, april 2005 A Solution to the Charging Problems in
- ieee transactions on ultrasonics, ferroelectrics, and frequency control, vol. 52, no. 1, january 2005 51 Coherent Array Imaging Using Phased
- Wideband micromachined capacitive microphones with radio frequency detection
- Ultrasonic Mixing in Microfluidic Channels Using Integrated Transducers
- lEEE TRANSACTIONS ON ULTRASONICS, FERROELECTRICS, AND FREQUENCY CONTROL, VOL. 50, NO. 11, NOVEMBER 2003 1581 Volumetric Ultrasound Imaging Using 2-D
- 1266 IEEE JOURNAL OF SOLID-STATE CIRCUITS, VOL. 38, NO. 7, JULY 2003 A Multichannel Pipeline Analog-to-Digital Converter
- Capacitive Micromachined Ultrasonic Transducers: Theory and Technology
- Piezoelectric droplet ejector for ink-jet printing of fluids and solid particles Gokhan Percina)
- Micromachined droplet ejector arrays Gokhan Percin,a)
- 1596 ieee transactions on ultrasonics, ferroelectrics, and frequency control, vol. 49, no. 11, november 2002 Capacitive Micromachined Ultrasonic
- ,FEE 'TR,\NSACTIUNS OH ULTI~ASONICS: FERltUELEcrRICS, AND FREQUENCY CONTROL: VOL. 49, N o . 5. MAY 2002 573 Piezoelectrically Actuated Flextensional
- iEEE `TRANSACTIONS ON ULTRASONICS: k'I;HI1OELECTRICS, AND FKCQUEXCY CONTROL, VOL. 401NO. 5: MAY 2002 585 Piezoelectrically Actuated Flextensional
- 750 ieee transactions on ultrasonics, ferroelectrics, and frequency control, vol. 48, no. 3, may 2001 Characterization of One-Dimensional
- SIMULATION AND EXPERIMENTAL CHARACTERIZATION OF A 2-D, 3-MHZ CAPACITIVE MICROMACHINED ULTRASONIC
- Micromachined 2-D Array Piezoelectricailly Actuated Flextensional Transducers: New Designs
- Micromachinable ultrasonic leaky wave air transducers F. Levent Degertekin,a)
- 678 ieee transactions on ultrasonics, ferroelectrics, and frequency control, vol. 45, no. 3, may 1998 Surface Micromachined Capacitive
- Resist deposition without spinning by using novel inkjet technology and direct lithography for MEMS
- Micromachined 2-D Array Piezoelectricallly Actuated Flextensional Transducers
- Silicon micromachined ultrasonic immersion transducers H. T. Soh, I. Ladabaum,a)
- IEEE TRANSACTIONS ON ULTRASONICS, FERROELECTRICS, AND FREQUENCY CONTROL, VOL. 43, NO. 1, JANUARY 1996 1 A Surface Micromachined Electrostatic
- Microfabricated Ultrasonic Transducers: Towards Robust Models and Immersion Devices
- LAMBWAVETOMOGRAPHYANDITSAPPLICATION IN PIPE EROSION/CORROSIONMONITORING
- A Surface MicromachinedElectrostaticUltrasonic Air Transducer Matthew I. Haller* and Butrus T. Khuri-Yakub
- One-point contact measurement of spherical resonances C. P: Hsieh and B. Y. Khuri-Yakub
- A noncontacting technique for measuring surface tension of liquids C. Cinbis and B. T. Khuri-Yakub
- In situ Simultaneous Measurement of Temperature and Thin Film Thickness with Ultrasonic Techniques
- SARASWAT et al.: RAPID THERMAL MULTIPROCESSINGFOR A PROGRAMMABLE FACTORY 159 Rapid Thermal Multiprocessing for a Programmable
- Micromachinable Leaky Wave Air Transducers
- Hertzian contact transducers for nondestructive evaluation F. L. Degertekin and B. T. Khuri-Yakub
- DYNAMIC ANALYSIS OF CMUTs IN DIFFERENT REGIMES OF OPERATION Baris Bayram, Edward Hggstrm, Arif Sanli Ergun, Goksen G. Yaralioglu, and Butrus T. Khuri-Yakub
- Collapsed Regime Operation of Capacitive Micromachined Ultrasonic Transducers based on Wafer-Bonding Technique
- 2162 ieee transactions on ultrasonics, ferroelectrics, and frequency control, vol. 52, no. 12, december 2005 Introduction to the Special Issue on
- 326 ieee transactions on ultrasonics, ferroelectrics, and frequency control, vol. 52, no. 2, february 2005 Capacitive Micromachined Ultrasonic
- 08853010/$25.00 2008 IEEE 2651IEEE TransacTIons on UlTrasonIcs, FErroElEcTrIcs, and FrEqUEncy conTrol, vol. 55, no. 12, dEcEmbEr 2008
- In Situ Monitoring of Crystallinily and Temperature during Rapid Thermal Crystallization of Silicon on Glass
- 1918 ieee transactions on ultrasonics, ferroelectrics, and frequency control, vol. 53, no. 10, october 2006 Comparison of Conventional and Collapsed
- APPLICATION OF SURFACEIMPEDANCEAPPROACH TO ULTRASONIC WAVEPROPAGATIONIN LAYERED ANISOTROPIC MEDIA
- 44 NA iEEE SpEctrum mAy 2009 www.spectrum.ieee.org Authorized licensed use limited to: Stanford University. Downloaded on October 19, 2009 at 14:13 from IEEE Xplore. Restrictions apply.
- Ultrasonics 36 ( 1998) 25~29 Miniature drumheads: microfabricated ultrasonic transducers
- ieee transactions on ultrasonics, ferroelectrics, and frequency control, vol. 55, no. 2, february 2008 327 Integration of 2D CMUT Arrays with
- Ultrasonic cure and temperature monitoring of photoresist during pre-exposure bake process
- 378 IEEE ELECTRON DEVICE LETTERS, VOL. 18, NO. 8, AUGUST 1997 Controlled Two-Step Solid-Phase Crystallization
- Piezoelectrically actuated flextensional micromachined ultrasound transducers
- RESIDUAL STRESS AND YOUNG'S MODULUS MEASUREMENT OF CAPACITIVE MICROMACHINED ULTRASONIC
- ieee transactions on ultrasonics, ferroelectrics, and frequency control, vol. 53, no. 8, august 2006 1513 Experimental Characterization of
- Improved Modeling and Fabrication Techniques for Capacitive Micromachined Ultrasonic Lamb Wave Transducers
- Proceedlogs o f t b e 2003 IEEE International Conference on Robotics & Automition
- 08853010/$25.00 2009 IEEE 2145IEEE TransacTIons on UlTrasonIcs, FErroElEcTrIcs, and FrEqUEncy conTrol, vol. 56, no. 10, ocTobEr 2009
- IEEE TRANSACTIONS ON SEMICONDUCTOR MANUFACTURING, VOL. 18, NO. 4, NOVEMBER 2005 709 Femtoliter to Picoliter Droplet Generation for
- In situ ultrasonic measurement of photoresist glass transition temperature Susan L. Morton,a)
- IEEE TransacTIons on UlTrasonIcs, FErroElEcTrIcs, and FrEqUEncy conTrol, vol. 58, no. 7, jUly 20111406 08853010/$25.00 2011 IEEE
- Capacitive micromachined ultrasonic transducers for medical imaging and therapy This article has been downloaded from IOPscience. Please scroll down to see the full text article.
- Sensors and Actuators B 160 (2011) 11201127 Contents lists available at SciVerse ScienceDirect
- r XXXX American Chemical Society A dx.doi.org/10.1021/ac201626b |Anal. Chem. XXXX, XXX, 000000 pubs.acs.org/ac
