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A 600kHz ELECTRICALLY-COUPLED MEMS BANDPASS FILTER Siavash Pourkamali, Reza Abdolvand, and Farrokh Ayazi
 

Summary: A 600kHz ELECTRICALLY-COUPLED MEMS BANDPASS FILTER
Siavash Pourkamali, Reza Abdolvand, and Farrokh Ayazi
School of Electrical and Computer Engineering
Georgia Institute of Technology, Atlanta, GA 30332-0250, USA
Email: ayazi@ece.gatech.edu; Tel: 1-404-894-9496; Fax: 1-404-894-4700
ABSTRACT
This paper presents a 600kHz MEMS bandpass filter
implemented using electrical coupling of single crystal
silicon HARPSS micromechanical resonators. Passive and
active filter synthesis approaches based on electrical
coupling of capacitive MEMS resonators are introduced and
discussed. A third order passive bandpass filter at the center
frequency of 600kHz with a bandwidth of 125Hz, a
stopband rejection of 48dB, and a 20dB-shape-factor of 2.1
is demonstrated. A quality factor (Q) enhancement
technique based on active electrical cascading of the
resonators is also presented. A 3-stage active cascade at
600kHz demonstrated a 2 increase in the effective Q.
1. INTRODUCTION
Over the past few years, extensive efforts have been

  

Source: Ayazi, Farrokh - School of Electrical and Computer Engineering, Georgia Institute of Technology

 

Collections: Engineering