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Massively parallel fabrication of repetitive nanostructures: nanolithography for nanoarrays This article has been downloaded from IOPscience. Please scroll down to see the full text article.
 

Summary: Massively parallel fabrication of repetitive nanostructures: nanolithography for nanoarrays
This article has been downloaded from IOPscience. Please scroll down to see the full text article.
2009 J. Phys. D: Appl. Phys. 42 123001
(http://iopscience.iop.org/0022-3727/42/12/123001)
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IP Address: 137.132.123.69
The article was downloaded on 29/06/2009 at 14:29
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IOP PUBLISHING JOURNAL OF PHYSICS D: APPLIED PHYSICS
J. Phys. D: Appl. Phys. 42 (2009) 123001 (18pp) doi:10.1088/0022-3727/42/12/123001
TOPICAL REVIEW
Massively parallel fabrication of repetitive
nanostructures: nanolithography for
nanoarrays
Regina Luttge
Mesoscale Chemical Systems, MESA+ Institute for Nanotechnology, Faculty of Science and
Technology, University of Twente, 7500 AE Enschede, The Netherlands
E-mail: R.Luttge@utwente.nl

  

Source: Adeyeye, Adekunle - Department of Electrical and Computer Engineering, National University of Singapore

 

Collections: Physics; Materials Science