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MEMS resonant load cells for micro-mechanical test frames: feasibility study and optimal This article has been downloaded from IOPscience. Please scroll down to see the full text article.
 

Summary: MEMS resonant load cells for micro-mechanical test frames: feasibility study and optimal
design
This article has been downloaded from IOPscience. Please scroll down to see the full text article.
2010 J. Micromech. Microeng. 20 125004
(http://iopscience.iop.org/0960-1317/20/12/125004)
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The article was downloaded on 18/01/2011 at 16:11
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IOP PUBLISHING JOURNAL OF MICROMECHANICS AND MICROENGINEERING
J. Micromech. Microeng. 20 (2010) 125004 (17pp) doi:10.1088/0960-1317/20/12/125004
MEMS resonant load cells for
micro-mechanical test frames: feasibility
study and optimal design
A Torrents1, K Azgin1, S W Godfrey1, E S Topalli2, T Akin2 and
L Valdevit1
1
Mechanical and Aerospace Engineering Department, University of California, Irvine, CA 92697, USA

  

Source: Akin, Tayfun - Department of Electrical and Electronics Engineering, Middle East Technical University

 

Collections: Engineering