Summary: MEMS resonant load cells for micro-mechanical test frames: feasibility study and optimal
This article has been downloaded from IOPscience. Please scroll down to see the full text article.
2010 J. Micromech. Microeng. 20 125004
IP Address: 220.127.116.11
The article was downloaded on 18/01/2011 at 16:11
Please note that terms and conditions apply.
View the table of contents for this issue, or go to the journal homepage for more
Home Search Collections Journals About Contact us My IOPscience
IOP PUBLISHING JOURNAL OF MICROMECHANICS AND MICROENGINEERING
J. Micromech. Microeng. 20 (2010) 125004 (17pp) doi:10.1088/0960-1317/20/12/125004
MEMS resonant load cells for
micro-mechanical test frames: feasibility
study and optimal design
A Torrents1, K Azgin1, S W Godfrey1, E S Topalli2, T Akin2 and
Mechanical and Aerospace Engineering Department, University of California, Irvine, CA 92697, USA