Summary: MEMS resonant load cells for micro-mechanical test frames: feasibility study and optimal
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2010 J. Micromech. Microeng. 20 125004
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IOP PUBLISHING JOURNAL OF MICROMECHANICS AND MICROENGINEERING
J. Micromech. Microeng. 20 (2010) 125004 (17pp) doi:10.1088/0960-1317/20/12/125004
MEMS resonant load cells for
micro-mechanical test frames: feasibility
study and optimal design
A Torrents1, K Azgin1, S W Godfrey1, E S Topalli2, T Akin2 and
Mechanical and Aerospace Engineering Department, University of California, Irvine, CA 92697, USA