Summary: Fabrication, Assembly and Testing of a new X-Y Flexure Stage with substantially
zero Parasitic Error Motions
Precision Engineering Research Group, MIT
Fig.1 Experimental Set-up
We have invented a new kind of planer XY flexure stage based on parallel kinematics
which allows for entirely decoupled X and Y motions free of parasitic errors. Planer
constraints are arranged such that two ground mounted actuators produce two motions
independent of each other. Specifically,
· An X force produces an X displacement of the motion stage, and no Y displacement
or rotation. Same holds true for the Y axis as well.
· The point of application of X force moves only along X direction and is not affected
by a Y force. Same holds true for the Y axis as well.
Once these features are analytically and experimentally verified, they can lead to
significant advantages in terms of range of motion, accuracy of motion and simplicity in
motion control. Most parallel kinematics flexures have a limited range of motion since
larger motions induce non-linearity and parasitic coupling, which in turn limits accuracy.
Despite being parallel mechanisms, the proposed designs allow for relatively larger range
of motion due to their unique arrangement of flexure building blocks. While repeatability