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Summary: 248 IEEE TRANSACTIONS ON COMPUTER-AIDED DESIGN OF INTEGRATED CIRCUITS AND SYSTEMS, VOL. 25, NO. 2, FEBRUARY 2006
Algorithms in FastStokes and Its Application to
Micromachined Device Simulation
Xin Wang, Member, IEEE, Joe Kanapka, Wenjing Ye, Narayan R. Aluru, Member, IEEE,
and Jacob White, Associate Member, IEEE
Abstract--For a wide variety of micromachined devices, de-
signers need accurate analysis of fluid drag forces for compli-
cated three-dimensional (3-D) problems. This paper describes
FastStokes, a recently developed 3-D fluid analysis program. Fast-
Stokes rapidly computes drag forces on complicated structures by
solving an integral formulation of the Stokes equation using a pre-
corrected fast Fourier transform (PFFT)-accelerated boundary
element method (BEM). The specializations of the PFFT algorithm
to the Stokes flow problem are described, and computational
results are presented. Timing results are used to demonstrate that
FastStokes scales almost linearly with problem complexity, can
easily analyze structures as complicated as an entire comb drive
in under an hour, and can produce results that accurately match
measured data.
Index Terms--Boundary element method (BEM), FastStokes,
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