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Controllable excimer-laser fabrication of conical nano-tips on silicon D. G. Georgiev,a)
 

Summary: Controllable excimer-laser fabrication of conical nano-tips on silicon
thin films
D. G. Georgiev,a)
R. J. Baird, I. Avrutsky, and G. Auner
Department of Electrical and Computer Engineering, Wayne State University, Detroit, Michigan 48202
G. Newaz
Department of Mechanical Engineering, Wayne State University, Detroit, Michigan 48202
Received 17 February 2004; accepted 19 April 2004; published online 25 May 2004
We have found conditions for the reproducible, direct laser fabrication of sharp conical tips with
heights of about 1 m and apical radii of curvature of several tens of nanometers. An individual
cone is formed when single-crystalline silicon on a silica substrate is irradiated with a single pulse
from a KrF excimer laser, homogenized and shaped to a circular spot several microns in diameter.
Atomic force microscopy and field-emission scanning electron microscopy were used to
characterize these structures. A simple mechanism of formation based on movement of melted
material is proposed. Our results suggest that this technique could produce even smaller structures
by optimizing the laser processing geometry. 2004 American Institute of Physics.
DOI: 10.1063/1.1762978
The interaction between high-intensity pulsed laser ra-
diation and solids results in materials changes that are of
great technological importance and scientific interest. The

  

Source: Avrutsky, Ivan - Department of Electrical and Computer Engineering, Wayne State University

 

Collections: Engineering